Low-Pressure Small MEMS Accelerometer Using Sigma-Delta Modulation von Vasco Lima, Jorge Cabral, Burkhard Kuhlmann, Luis Alexandre Rocha

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Micromachined Angular Rate Sensors for Automotive Applications von Neul, R., Gomez, U.-M., Kehr, K., Bauer, W., Classen, J., Doring, C., Esch, E., Gotz, S., Hauer, J., Kuhlmann, B., Lang, C., Veith, M., Willig, R.

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Resonant Accelerometer based on Double-Ended Tuning Fork and a Force Amplification Mechanism von Eurico Esteves Moreira, Burkhard Kuhlmann, João Gaspar, Luis Alexandre Rocha

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Mode-Split MEMS Gyroscopes Under Bending Stress: Detection Mode Coupling and the Relation to Cross-Axis Sensitivity von Mayer, Wolfram, Kuhlmann, Burkhard, Guerrieri, Andrea, Hiller, Tobias, Zimmermann, Andre

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Investigating the Effects of Stress on Die Deformation and on Cross-Axis Offset Drift in Mode-Split MEMS Gyroscopes von Mayer, Wolfram, Kuhlmann, Burkhard, Hiller, Tobias, Balslink, Thorsten, Kunz, Ulrich, Zimmermann, Andre

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Highly sensitive MEMS frequency modulated accelerometer with small footprint von Esteves Moreira, Eurico, Kuhlmann, Burkhard, Serra Alves, Filipe, Alves Dias, Rosana, Cabral, Jorge, Gaspar, João, Rocha, Luis Alexandre

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100 kHz MEMS Vibratory Gyroscope von Liewald, Jan-Timo, Kuhlmann, Burkhard, Balslink, Thorsten, Trachtler, Martin, Dienger, Matthias, Manoli, Yiannos

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Rotation rate sensor with multiple evaluation during operation at several frequencies von Kuhlmann, Burkhard, Balslink, Thorsten

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ROTATION RATE SENSOR WITH MULTIPLE EVALUATION DURING OPERATION AT SEVERAL FREQUENCIES von Kuhlmann, Burkhard, Balslink, Thorsten

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OPERATOR DEVICE AND METHOD FOR OPERATING A CAPACITIVE SENSOR von Kuhlmann, Burkhard, Giner De Haro, Joan Josep, Dati, Angelo, Balslink, Thorsten, Hattass, Mirko

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MEMS rotation rate sensor including combined driving and detection von Kuhlmann, Burkhard, Wellner, Patrick, Hattass, Mirko

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Simulation and optimization of metal-insulator-semiconductor inversion-layer silicon solar cells von Kuhlmann, B., Aberle, A.G., Hezel, R., Heiser, G.

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Method for producing thin MEMS chips on SOI substrate and micromechanical component von Kuhlmann, Burkhard, Reinmuth, Jochen, Hoefer, Holger

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Micromechanical rate-of-rotation sensor set-up, rate-of-rotation sensor array and corresponding manufacturing method von Liewald, Jan-Timo, Neul, Reinhard, Kuhlmann, Burkhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Pruetz, Odd-Axel, Degenfeld-Schonburg, Peter

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ROTATIONAL SPEED SENSOR AND OPERATION OF A ROTATIONAL SPEED SENSOR AT VARIOUS FREQUENCIES AND IN VARIOUS DIRECTIONS von Kuhlmann, Burkhard, Lassl, Andreas, Balslink, Thorsten

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Yaw-rate sensor with a substrate having a main extension plane, method for manufacturing a yaw-rate sensor von Liewald, Jan-Timo, Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Kuehnel, Matthias, Bode, Niels, Degenfeld-Schonburg, Peter

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METHOD FOR PRODUCING THIN MEMS CHIPS ON SOI SUBSTRATE AND MICROMECHANICAL COMPONENT von Kuhlmann, Burkhard, Reinmuth, Jochen, Hoefer, Holger

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CAPTEUR DE VITESSE DE ROTATION COMPORTANT UN SUBSTRAT AVEC UN PLAN PRINCIPAL D'EXTENSION AINSI QU'UN PROCEDE DE FABRICATION D'UN CAPTEUR DE VITESSE DE ROTATION von DEGENFELD-SCHONBURG, PETER, KUHLMANN, NILS FELIX, KUEHBEL, MATTHIAS, NEUL, REINHARD, KUHLMANN, BURKHARD, LASSL, ANDREAS, BODE, NIELS, LIEWALD, JAN-TIMO

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Rotation rate sensor with multiple evaluation during operation at several frequencies and method for operating rotation rate sensor von BALSLINK, THORSTEN, KUHLMANN, BURKHARD

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One-axis and two-axis rotation rate sensor von Kuhlmann, Burkhard, Neul, Reinhard, Kuhlmann, Nils Felix, Lassl, Andreas, Bode, Niels, Degenfeld-Schonburg, Peter

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