Use of Virtual Metrology for in-situ Visualization of Thermal Uniformity and Handoff Adjustment in RTP Critical Anneals von Vitale, V., Aderhold, W., Hunter, A., Iliopoulos, I., Kroupnova, N., Yanovich, A., Merry, N.

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Method and apparatus to automatically create virtual sensors with templates von Kril, Thorsten, Kroupnova, Natalia, Yanovich, Aleksey, Kozine, Mikhail B

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Virtual sensors von KROUPNOVA NATALIA, KRIL THORSTEN, YANOVICH ALEKSEY

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METHOD AND APPARATUS TO AUTOMATICALLY CREATE VIRTUAL SENSORS WITH TEMPLATES von KOZINE MIKHAIL B, KROUPNOVA NATALIA, KRIL THORSTEN, YANOVICH ALEKSEY

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Method and apparatus to automatically create virtual sensors with templates von KOZINE MIKHAIL B, KROUPNOVA NATALIA, KRIL THORSTEN, YANOVICH ALEKSEY

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Method and apparatus to automatically create virtual sensors with templates von KOZINE MIKHAIL B, KROUPNOVA NATALIA, KRIL THORSTEN, YANOVICH ALEKSEY

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Wafer fabrication data acquisition and management systems von LOUNEVA, INNA+, CORDOVA, SHERRY, DOYLE, TERRY L, LOBOVSKI, EVGUENI, KROUPNOVA, NATALIA

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Wafer fabrication data acquisition and management systems von NISHIMURA YUKARI, DOYLE TERRY L, LYON RICHARD C, CORDOVA SHERRY, NOLET CLARI, WILMER MICHAEL E, KROUPNOVA NATALIA, REISS TERRY, LOBOVSKI EVGUENI, TOH WOON YOUNG, LOUNEVA INNA

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Wafer fabrication data acquisition and management systems von Cordova, Sherry, Doyle, Terry L, Kroupnova, Natalia, Lobovski, Evgueni, Louneva, Inna, Lyon, Richard C, Nishimura, Yukari, Nolet, Clari, Reiss, Terry, Toh, Woon Young, Wilmer, Michael E

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Wafer fabrication data acquisition and management systems von WILMER, MICHAEL E, CORDOVA, SHERRY, NISHIMURA, YUKARI, NOLET, CLARICE M, LYON, RICHARD C, LOUNEVA, INNA, LOBOVSKI, EVGUENI, KROUPNOVA, NATALIA, REISS, TERRY, DOYLE, TERRY, TOH, WOON YOUNG

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SYSTEM FOR ACQUIRING AND MANAGING WAFER MANUFACTURING DATA von NISHIMURA YUKARI, LYON RICHARD C, CORDOVA SHERRY, NOLET CLARICE M, KROUPNOVA NATALIA, REISS TERRY, MICHAEL E WILLMER, LOBOVSKI EVGUENI, TOH WOON YOUNG, DOYLE TERRY, LOUNEVA INNA

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Wafer fabrication data acquisition and management systems von WILMER, MICHAEL E, CORDOVA, SHERRY, NISHIMURA, YUKARI, NOLET, CLARICE M, LYON, RICHARD C, LOUNEVA, INNA, LOBOVSKI, EVGUENI, KROUPNOVA, NATALIA, REISS, TERRY, DOYLE, TERRY, TOH, WOON YOUNG

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