Atomic Layer Deposition of Iridium Oxide Thin Films from Ir(acac)3 and Ozone von Hämäläinen, Jani, Kemell, Marianna, Munnik, Frans, Kreissig, Ulrich, Ritala, Mikko, Leskelä, Markku

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Structural and mechanical characterization of BCxNy thin films deposited by pulsed reactive magnetron sputtering von KRAUSE, Matthias, BEDEL, Laurent, TAUPEAU, Anthony, KREISSIG, Ulrich, MUNNIK, Frans, ABRASONIS, Gintautas, KOLITSCH, Andreas, RADNOCZI, György, CZIGANY, Zsolt, VANHULSEL, Annick

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Atomic Layer Deposition of MgF2 Thin Films Using TaF5 as a Novel Fluorine Source von Pilvi, Tero, Puukilainen, Esa, Kreissig, Ulrich, Leskelä, Markku, Ritala, Mikko

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Radical Enhanced Atomic Layer Deposition of Tantalum Oxide von Niskanen, Antti, Kreissig, Ulrich, Leskelä, Markku, Ritala, Mikko

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Atomic Layer Deposition of MgF 2 Thin Films Using TaF 5 as a Novel Fluorine Source von Pilvi, Tero, Puukilainen, Esa, Kreissig, Ulrich, Leskelä, Markku, Ritala, Mikko

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14.5% near-normal incidence reflectance of Cr/Sc x-ray multilayer mirrors for the water window von Eriksson, Fredrik, Johansson, Göran A, Hertz, Hans M, Gullikson, Eric M, Kreissig, Ulrich, Birch, Jens

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Effect of Ion Energy on Structure and Composition of Cathodic Arc Deposited Alumina Thin Films von Rosen, Johanna, Mraz, Stanislav, Kreissig, Ulrich, Music, Denis, Schneider, Jochen M

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145% near-normal incidence reflectance of Cr Sc x-ray multilayer mirrors for the water window von Eriksson, Fredrik, Johansson, Göran A., Hertz, Hans M., Gullikson, Eric M., Kreissig, Ulrich, Birch, Jens

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Reducing the impurity incorporation from residual gas by ion bombardment during high vacuum magnetron sputtering von Rosén, Johanna, Widenkvist, Erika, Larsson, Karin, Kreissig, Ulrich, Mráz, Stanislav, Martinez, Carlos, Music, Denis, Schneider, J. M.

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Structural and mechanical characterization of BC x N y thin films deposited by pulsed reactive magnetron sputtering von Krause, Matthias, Bedel, Laurent, Taupeau, Anthony, Kreissig, Ulrich, Munnik, Frans, Abrasonis, Gintautas, Kolitsch, Andreas, Radnoczi, György, Czigány, Zsolt, Vanhulsel, Annick

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Study of anomalous behaviour of LiTaO3 during the annealed proton exchange process of optical waveguide’s formation – comparison with LiNbO3 von Salavcova, Linda, Spirkova, Jarmila, Ondracek, Frantisek, Mackova, Anna, Vacik, Jiri, Kreissig, Ulrich, Eichhorn, Frank, Groetzschel, Rainer

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Elastic modulus of amorphous boron suboxide thin films studied by theoretical and experimental methods von Music, Denis, Kreissig, Ulrich, Chirita, Valeriu, Schneider, Jochen M., Helmersson, Ulf

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Ion drift processes in pyrex-type alkali-borosilicate glass during anodic bonding von NITZSCHE, P, LANGE, K, SCHMIDT, B, GRIGULL, S, KREISSIG, U, THOMAS, B, HERZOG, K

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Ferromagnetic coupling field reduction in CoFeB tunnel junctions deposited by ion beam von Cardoso, S., Ferreira, R., Freitas, P.P., MacKenzie, M., Chapman, J., Ventura, J.O., Sousa, J.B., Kreissig, U.

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14.5 percent near normal incidence reflectance of Cr/Sc x-ray multilayer mirrors for the water window von Eriksson, Fredrik, Johansson, Goran A., Hertz, Hans M., Gullikson, Eric M., Kreissig, Ulrich, Birch, Jens

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Quantum design and synthesis of a boron–oxygen–yttrium phase von Music, Denis, Chirita, Valeriu, Kreissig, Ulrich, Czigány, Zsolt, Schneider, Jochen M., Helmersson, Ulf

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EFFECT OF THE ANNEALING PROCESS ON ACTIVE PROPERTIES OF PROTON-EXCHANGED OPTICAL WAVEGUIDES IN ERBIUM-DOPED LITHIUM NIOBATE von Salavcova, L, Spirkova, J, Capek, P, Novotna, M, Vacik, J, Mackova, A, Kreissig, U

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Composition analysis of NdxFeyB thin films by RBS and heavy ion ERDA von Grötzschel, R., Mäder, Michael, Kreissig, Ulrich, Grigull, Stephan, Assmann, Walter, Parhofer, Stefan

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Composition analysis of Nd xFe yB thin films by RBS and heavy ion ERDA von Grötzschel, R., Mäder, Michael, Kreissig, Ulrich, Grigull, Stephan, Assmann, Walter, Parhofer, Stefan

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VERFAHREN ZUR HERSTELLUNG VERGRABENER AETZSTOPSCHICHTEN IN SILICIUM von SCHMIDT,BERND,DD, KREISSIG,ULRICH,DD, SKORUPA,WOLFGANG,DD

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