Theoretical study on defect risks of chemically amplified resists used for extreme ultraviolet lithography von Kozawa, Takahiro

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Protected unit distribution near interfaces of chemically amplified resists used for extreme ultraviolet lithography von Kozawa, Takahiro

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Interfacial effects on sensitization of chemically amplified extreme ultraviolet resists von Kozawa, Takahiro

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Design strategy of extreme ultraviolet resists von Kozawa, Takahiro

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Focusing property of a double-ring-shaped radially polarized beam von KOZAWA, Yuichi, SATO, Shunichi

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Microstructural development of MnCO3 microsphere compacts through hydrothermal hot-pressing von Kozawa, Takahiro

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Defect risks at interfaces of chemically amplified resists in extreme ultraviolet lithography process von Kozawa, Takahiro

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Effects of underlayer absorption coefficient on bridging risk in chemically amplified resist process for extreme ultraviolet lithography von Kozawa, Takahiro

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Relationship between Defect Risks and Effective Reaction Radius for Deprotection in Chemically Amplified Resist Process for Extreme Ultraviolet Lithography von Kozawa, Takahiro

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Shielding effect of underlayer against secondary electrons generated in substrate in extreme ultraviolet lithography von Kozawa, Takahiro

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Formulation of trade-off relationships between resolution, line edge roughness, and sensitivity in sub-10 nm half-pitch region for chemically amplified extreme ultraviolet resists von Kozawa, Takahiro

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Theoretical study on trade-off relationships between resolution, line edge roughness, and sensitivity in resist processes for semiconductor manufacturing by extreme ultraviolet lit... von Kozawa, Takahiro

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Lattice deformation of LiNi0.5Mn1.5O4 spinel cathode for Li-ion batteries by ball milling von Kozawa, Takahiro

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Combined wet milling and heat treatment in water vapor for producing amorphous to crystalline ultrafine Li 1.3 Al 0.3 Ti 1.7 (PO 4 ) 3 solid electrolyte particles von Kozawa, Takahiro

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Novel method for screening probiotic candidates tolerant to human gastrointestinal stress von Kozawa, Takuma, Aoyagi, Hideki

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Optical trapping of micrometer-sized dielectric particles by cylindrical vector beams von Kozawa, Yuichi, Sato, Shunichi

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Generation of a radially polarized laser beam by use of a conical Brewster prism von KOZAWA, Yuichi, SATO, Shunichi

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Relationship between the surface free energy of underlayers and the dissolution kinetics of poly(4-hydroxystyrene) partially protected by t-butoxycarbonyl groups in tetramethylammo... von Wang, Jiahao, Kozawa, Takahiro

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Relationships between quencher diffusion constant and exposure dose dependences of line width, line edge roughness, and stochastic defect generation in extreme ultraviolet lithogra... von Kozawa, Takahiro

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Renal function is associated with blood neurofilament light chain level in older adults von Akamine, Shoshin, Marutani, Noriko, Kanayama, Daisuke, Gotoh, Shiho, Maruyama, Riki, Yanagida, Kanta, Sakagami, Yukako, Mori, Kohji, Adachi, Hiroyoshi, Kozawa, Junji, Maeda, Norikazu, Otsuki, Michio, Matsuoka, Takaaki, Iwahashi, Hiromi, Shimomura, Iichiro, Ikeda, Manabu, Kudo, Takashi

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