Thin-film (Al)BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition von Apaydin, Ramazan O., Aarnink, Antonius A. I., Gravesteijn, Dirk J., de Jong, Michel P., Kovalgin, Alexey Y.

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Thermal Atomic Layer Deposition of Polycrystalline Gallium Nitride von Banerjee, Sourish, Aarnink, Antonius A. I, Gravesteijn, Dirk J, Kovalgin, Alexey Y

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Area-Selective Low-Pressure Thermal Atomic Layer Deposition of Aluminum Nitride von van der Wel, Bernhard Y., van der Zouw, Kees, Aarnink, Antonius A. I., Kovalgin, Alexey Y.

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From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO2 Nanopowder von Grillo, Fabio, Bui, Hao, Zara, Damiano, Aarnink, Antonius A. I., Kovalgin, Alexey Y., Kooyman, Patricia, Kreutzer, Michiel T., Ommen, Jan Rudolf

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Cross-Bridge Kelvin Resistor Structures for Reliable Measurement of Low Contact Resistances and Contact Interface Characterization von Stavitski, N., Klootwijk, J.H., van Zeijl, H.W., Kovalgin, A.Y., Wolters, R.

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Composite GaN–C–Ga (“GaCN”) Layers with Tunable Refractive Index von Banerjee, Sourish, Onnink, Arnoud J, Dutta, Satadal, Aarnink, Antonius A. I, Gravesteijn, Dirk J, Kovalgin, Alexey Y

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Deposition and properties of silicon oxynitride films with low propagation losses by inductively coupled PECVD at 150°C von Rangarajan, Balaji, Kovalgin, Alexey Y., Schmitz, Jurriaan

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Conduction and Electric Field Effect in Ultra-Thin Tungsten Films von van der Zouw, Kees, Aarnink, Antonius A. I., Schmitz, Jurriaan, Kovalgin, Alexey Y.

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Charge carrier transport and electroluminescence in atomic layer deposited poly-GaN/c-Si heterojunction diodes von Gupta, Gaurav, Banerjee, Sourish, Dutta, Satadal, Aarnink, Antonius A. I., Schmitz, Jurriaan, Kovalgin, Alexey Y., Hueting, Raymond J. E.

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Conduction and electric field effect in ultra-thin TiN films von Van Bui, Hao, Kovalgin, Alexey Y., Schmitz, Jurriaan, Wolters, Rob A. M.

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From Single Atoms to Nanoparticles: Autocatalysis and Metal Aggregation in Atomic Layer Deposition of Pt on TiO 2 Nanopowder von Grillo, Fabio, Van Bui, Hao, La Zara, Damiano, Aarnink, Antonius A I, Kovalgin, Alexey Y, Kooyman, Patricia, Kreutzer, Michiel T, van Ommen, Jan Rudolf

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Hot‐Wire Assisted ALD: A Study Powered by In Situ Spectroscopic Ellipsometry von Kovalgin, Alexey Y., Yang, Mengdi, Banerjee, Sourish, Apaydin, Ramazan O., Aarnink, Antonius A. I., Kinge, Sachin, Wolters, Rob A. M.

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Li intercalation into multilayer graphene with controlled defect densities von Ochapski, Michal W., Ataç, Derya, Sanderink, Johnny G.M., Kovalgin, Alexey Y., de Jong, Michel P.

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PEALD AlN: Controlling growth and film crystallinity von Banerjee, Sourish, Aarnink, Antonius A. I., van de Kruijs, Robbert, Kovalgin, Alexey Y., Schmitz, Jurriaan

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Hot-wire assisted ALD of tungsten films: In-situ study of the interplay between CVD, etching, and ALD modes von Yang, Mengdi, Aarnink, Antonius A. I., Kovalgin, Alexey Y., Wolters, Rob A. M., Schmitz, Jurriaan

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Integration of Solar Cells on Top of CMOS Chips-Part II: CIGS Solar Cells von Jiwu Lu, Wei Liu, Kovalgin, Alexey Y., Yun Sun, Schmitz, Jurriaan

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An Area-Correction Model for Accurate Extraction of Low Specific Contact Resistance von Kovalgin, A. Y., Tiggelman, N., Wolters, R. A. M.

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Low-Temperature Fabricated TFTs on Polysilicon Stripes von Brunets, I., Holleman, J., Kovalgin, A.Y., Boogaard, A., Schmitz, J.

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Integration of Solar Cells on Top of CMOS Chips Part I: a-Si Solar Cells von Lu, J, Kovalgin, A Y, van der Werf, K H M, Schropp, R E I, Schmitz, J

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Evaluation of Transmission Line Model Structures for Silicide-to-Silicon Specific Contact Resistance Extraction von Stavitski, N., van Dal, M.J.H., Lauwers, A., Vrancken, C., Kovalgin, A.Y., Wolters, R.A.M.

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