26-4: Highly Oxidation-Resistant Mo-Alloys for Metal-Oxide TFT Metallization von Köstenbauer, Harald, Lorenz, Dominik, Winkler, Jörg

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A correlative experimental and ab initio approach to improve the fracture behavior of Mo thin films by alloying with Cu von Jörg, Tanja, Music, Denis, Cordill, Megan J., Franz, Robert, Köstenbauer, Harald, Linke, Christian, Winkler, Jörg, Schneider, Jochen M., Mitterer, Christian

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P-145: Optimization of Molybdenum Oxides for Low-Reflectance Thin Films using Numerical Simulation von Köstenbauer, Harald, Lorenz, Dominik, Winkler, Joerg, Theiss, Wolfgang

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Deformation behavior of Re alloyed Mo thin films on flexible substrates: In situ fragmentation analysis supported by first-principles calculations von Jörg, Tanja, Music, Denis, Hauser, Filipe, Cordill, Megan J., Franz, Robert, Köstenbauer, Harald, Winkler, Jörg, Schneider, Jochen M., Mitterer, Christian

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Electro-mechanical behavior of Al/Mo bilayers studied with in situ straining methods von Kreiml, Patrice, Rausch, Martin, Terziyska, Velislava L., Köstenbauer, Harald, Winkler, Jörg, Mitterer, Christian, Cordill, Megan J.

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48.4: Galvanic Corrosion of Molybdenum Alloys and Oxides in contact with Copper for Thin Film Transistors using Evans Diagrams von Riedl, Jessica, Mori, Gregor, Schmidt, Hennrik, Köstenbauer, Harald

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Structure, stresses and stress relaxation of TiN/Cu multilayer and nanocomposite coatings von Köstenbauer, Harald, Hofer, Anna M., Fontalvo, Gerardo A., Keckes, Jozef, Mitterer, Christian

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A Comparison of 90° Bending for Foldable Electronics von Cordill, Megan J., Kreiml, Patrice, Köstenbauer, Harald, Mitterer, Christian

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Structure evolution in reactively sputtered molybdenum oxide thin films von Pachlhofer, Julia M., Jachs, Christoph, Franz, Robert, Franzke, Enrico, Köstenbauer, Harald, Winkler, Jörg, Mitterer, Christian

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Oxidation and wet-etching behavior of MoAlTi thin films deposited by sputtering from a rotatable MoAlTi compound target von Lorenz, Roland, O’Sullivan, Michael, Sprenger, Dietmar, Lang, Bernhard, Köstenbauer, Harald, Winkler, Jörg, Mitterer, Christian

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Non-reactive dc magnetron sputter deposition of Mo-O thin films from ceramic MoOx targets von Pachlhofer, Julia M., Tarazaga Martín-Luengo, Aitana, Franz, Robert, Franzke, Enrico, Köstenbauer, Harald, Winkler, Jörg, Bonanni, Alberta, Mitterer, Christian

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Industrial-scale sputter deposition of molybdenum oxide thin films: Microstructure evolution and properties von Pachlhofer, Julia M., Martín-Luengo, Aitana Tarazaga, Franz, Robert, Franzke, Enrico, Köstenbauer, Harald, Winkler, Jörg, Bonanni, Alberta, Mitterer, Christian

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15‐3: Resistance Reduction of Mo Metallization by W Seed Layer von Köstenbauer, Harald, Schmidt, Hennrik, Lorenz, Dominik, Linke, Christian, Zhang, Ying, Dong, Chengyuan, Winkler, Joerg

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Balancing the electro-mechanical and interfacial performance of Mo-based alloy films von Kreiml, Patrice, Rausch, Martin, Terziyska, Velislava L., Köstenbauer, Harald, Winkler, Jörg, Mitterer, Christian, Cordill, Megan J.

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Pulvermetallurgisch hergestellte Sputtertargets von Adelhelm, Christoph, Winkler, Jörg, Linke, Christian, Franzke, Enrico, Köstenbauer, Harald

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Pulvermetallurgisch hergestellte Sputtertargets: für die CIGS Dünnschichtphotovoltaik von Adelhelm, Christoph, Winkler, Jörg, Linke, Christian, Franzke, Enrico, Köstenbauer, Harald

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Pulvermetallurgisch hergestellte Sputtertargets von Adelhelm, Christoph, Winkler, Jörg, Linke, Christian, Franzke, Enrico, Köstenbauer, Harald

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Metallization for a thin film component, method for the production thereof, and sputtering target von KATHREIN MARTIN, KOSTENBAUER JUDITH, WINKLER JORG, KOSTENBAUER HARALD, LEICHTFRIED GERHARD, EIDENBERGER ELISABETH, HWANG MOO SUNG

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Touch sensor arrangement von LORENZ DOMINIK, WINKLER JORG, KOSTENBAUER HARALD, TSENG BRUCE

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METALLIZATION FOR A THIN FILM COMPONENT, METHOD FOR THE PRODUCTION THEREOF, AND SPUTTERING TARGET von HWANG, Moo Sung, KÖSTENBAUER, Harald, KÖSTENBAUER, Judith, KATHREIN, Martin, EIDENBERGER, Elisabeth, WINKLER, Jörg, LEICHTFRIED, Gerhard

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