An experimental study of solid source diffusion by spin on dopants and its application for minimal silicon-on-insulator CMOS fabrication von Liu, Yongxun, Koga, Kazuhiro, Khumpuang, Sommawan, Nagao, Masayoshi, Matsukawa, Takashi, Hara, Shiro

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Investigation of piezoresistive effect in p-channel metal-oxide-semiconductor field-effect transistors fabricated on circular silicon-on-insulator diaphragms using cost-effective m... von Liu, Yongxun, Tanaka, Hiroyuki, Umeyama, Norio, Koga, Kazuhiro, Khumpuang, Sommawan, Nagao, Masayoshi, Matsukawa, Takashi, Hara, Shiro

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(Invited) Development of CMOS-MEMS Cointegrated Pressure Sensor Using Minimal Fab Process von Liu, Yongxun, Akita, Ippei, Matsukawa, Takashi, Tanaka, Hiroyuki, Koga, Kazuhiro, Nemoto, Kazumasa, Khumpuang, Sommawan, Nagao, Masayoshi, Morita, Yukinori, Hara, Shiro

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OPTICAL ELEMENT, OPTICAL APPARATUS, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT von KOGA, KAZUHIRO

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Communication apparatus, control method, and program von Kazuhiro Koga

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Plasma Damage Recovery of Organic Low-k Material von Hirai, Mihoko, Tada, Masahiro, Akiyama, Yoshihito, Koga, Kazuhiro

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Communication apparatus, control method, and storage medium von Koga, Kazuhiro

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JSFR key technology evaluation on fuel handling system von Chikazawa, Yoshitaka, Katoh, Atsushi, Obata, Hiroyuki, Uzawa, Masayuki, Koga, Kazuhiro, Chishiro, Ryo

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Study of multilayer wiring process using NSG in Minimal Fab von Kase, Masashi, Kazuhiro, Koga, Khumpuang, Sommawan, Hara, Shiro

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Communication apparatus, control method, and program von Kazuhiro Koga

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Development of Inspection and Repair Techniques in Reactor Vessel of Experimental Fast Reactor "Joyo" von Ashida, Takashi, Ito, Hideaki, Miyamoto, Kazuyuki, Nakamura, Toshiyuki, Koga, Kazuhiro, Oohara, Norikazu, Ino, Hiroichi

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IMAGE CAPTURING APPARATUS, CONTROL APPARATUS, STORAGE MEDIUM, AND CONTROL METHOD von Koga, Kazuhiro

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Strategy of Device Development of Minimal Fab and Utilization of TCAD Technology von Hamamoto, Takeshi, Koga, Kazuhiro, Kogayu, Hiroshige, Hattori, Junichi, Fukuda, Koichi, Sommawan, Khumpuang, Hara, Shiro

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New Assessment Scales for Evaluating the Degree of Risk of Wind Turbine Yaw System Caused by Terrain-Induced Turbulence von KAWASHIMA, Yasushi, UCHIDA, Takanori, KOGA, Kazuhiro, YAMASHITA, Kota, TANAKA, Keita, NAGAIWA, Keiichiro, EGASHIRA, Hiroshi

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OPTICAL ELEMENT, OPTICAL DEVICE, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT von KOGA KAZUHIRO

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INFORMATION PROCESSING APPARATUS, METHOD OF CONTROLLING INFORMATION PROCESSING APPARATUS, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM von Koga, Kazuhiro

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Development of Liquid TEM Cell Fabrication Process Using Minimal Fab Tools von Liu, Yongxun, Murakami, Katsuhisa, Li, Xiaoguang, Nemoto, Kazumasa, Noda, Shuichi, Tanaka, Hiroyuki, Koga, Kazuhiro, Khumpuang, Sommawan, Morita, Yukinori, Matsukawa, Takashi, Hara, Shiro, Takeguchi, Masaki, Nagao, Masayoshi

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Fabrication of piezoresistive pressure sensor using minimal deep-RIE and mask aligner von Liu, Yongxun, Tanaka, Hiroyuki, Koga, Kazuhiro, Nemoto, Kazumasa, Khumpuang, Sommawan, Nagao, Masayoshi, Matsukawa, Takashi, Hara, Shiro

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Film Characteristics deposited by Minimal Fab TiN Reactive Sputtering Tool (2) von Noda, Shuichi, Koga, Kazuhiro, Nemoto, Kazumasa, Yabuta, Yuuki, Yamamoto, Naoko, Kamei, Ryuichiro, Khumpuang, Sommawan, Hara, Shiro

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Fabrication of pH-ISFETs with SiO2 Sensing Layer by Using Minimal Fab von Kageyama, Tomoaki, Koga, Kazuhiro, Khumpuang, Sommawan, Hara, Shiro, Lee, Sang-Seok

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