PVD-IMP TUNGSTEN AND TUNGSTEN NITRIDE AS A LINER, BARRIER AND/OR SEED LAYER FOR TUNGSTEN, ALUMINIUM AND COPPER APPLICATIONS von BERTHA P. CHANG, VIKASH BANTHIA, BARRY CHIN, PEIJUN DING, NIRMALYA MAITY, ALFRED MAK, PAUL KITABJIAN, ZHENG XU, GONGDA YAO, S. BRAD HUNTER, DINESH SAIGAL

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PVD-IMP tungsten and tungsten nitride as a liner, barrier, and/or seed layer von HERNER, BRAD S, SAIGAL, DINESH, SUN, BINGXI, DING, PEIJUN, MAK, ALFRED, KITABJIAN, PAUL, CHIN, BARRY, CHANG, BERTHA P, XU, ZHENG, BANTHIA, VIKASH, YAO, GONDA, MAITY, NIRMALYA

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PVD-IMP TUNGSTEN AND TUNGSTEN NITRIDE AS LINER, BARRIER AND/OR SEED LAYER FOR APPLICATION OF TUNGSTEN, ALUMINUM AND COPPER von SUN BINGXI, SAIGAL DINESH, CHIN BARRY, MAITY NIRMALYA, HERNER BRAD S, BANTHIA VIKASH, YAO GONGDA, CHANG BERTHA P, KITABJIAN PAUL, XU ZHENG, MAK ALFRED, DING PEIJUN

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PVD-IMP tungsten and tungsten nitride as a liner, barrier, and/or seed layer von HERNER, BRAD S, SAIGAL, DINESH, SUN, BINGXI, DING, PEIJUN, MAK, ALFRED, KITABJIAN, PAUL, CHIN, BARRY, CHANG, BERTHA P, XU, ZHENG, BANTHIA, VIKASH, YAO, GONDA, MAITY, NIRMALYA

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PVD-IMP TUNGSTEN AND TUNGSTEN NITRIDE AS LINER, BARRIER, AND/OR SEED LAYER FOR TUNGSTEN, ALUMINUM AND COPPER APPLICATIONS von SUN BINGXI, SAIGAL DINESH, CHIN BARRY, HERNER BRAD S, MAITY NIRMALYA, BANTHIA VIKASH, YAO GONGDA, CHANG BERTHA P, KITABJIAN PAUL, XU ZHENG, MAK ALFRED, DING PEIJUN

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