New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60 nm and below DRAMs von HO JIN CHO, YOUNG DAE KIM, YONG WOOK SONG, DONG SU PARK, LEE, Euna, CHEOL HWAN PARK, JUN SOO JANG, KEUM BUM LEE, HAI WON KIM, YOUNG JONG KI, HAN, Keun

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Formation and Characterization of Thin Silicon Dioxide Films Obtained by Inductively-Coupled High-Density Plasmas using a Dual Rotated Spiral Antenna System von Kim, Yil Wook, Woo, Sang Ho, Kim, Hai-Won, Um, Pyung Yong, Ji, Jung-Min, Kim, Chang-Koo

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New TIT Capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs von Ho Jin Cho, Young Dae Kim, Dong Su Park, Euna Lee, Cheol Hwan Park, Jun Soo Jang, Keum Bum Lee, Hai Won Kim, Soo Jin Chae, Young Jong Ki, Il Keun Han, Yong Wook Song

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METHOD OF FORMING SEMICONDUCTOR DEVICE INCLUDING SEMICONDUCTOR LINER von LEE JEONG HYUN, KIM HAI WON, JEON BONG SEOK, KIM JI YONG

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Switch box support von KIM HAI-WON

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METHOD OF FORMING SEMICONDUCTOR DEVICE INCLUDING SEMICONDUCTOR LINER von JEON, Bong Seok, KIM, Hai Won, KIM, Ji Yong, LEE, Jeong Hyun

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VERTICAL SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE VERTICAL SEMICONDUCTOR DEVICE von PARK, In-Su, KIM, Hai-Won, KIM, Jong-Gi, JEONG, Hoe-Min

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Vertical semiconductor device and method for fabricating the vertical semiconductor device von Kim, Jong-Gi, Jeong, Hoe-Min, Park, In-Su, Kim, Hai-Won

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New TIT capacitor with ZrO2/Al2O3/ZrO2 dielectrics for 60nm and below DRAMs von Cho, Ho Jin, Kim, Young Dae, Park, Dong Su, Lee, Euna, Park, Cheol Hwan, Jang, Jun Soo, Lee, Keum Bum, Kim, Hai Won, Ki, Young Jong, Han, Il Keun, Song, Yong Wook

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Hydraulic swing type plate shearing machine von KIM HAI-WON, WANG GUOQI

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Structural and Morphological Properties of Nitrogen Doped Polysilicon for Advanced Gate Material von Woo, Sang Ho, Kim, Yil Wook, Um, Pyung Yong, Kim, Hai Won, Cho, Sung Kil, Choe, Hyung Su, Lee, Dong Keun, Kim, Chang-Koo

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New TIT capacitor with ZrO 2/Al 2O 3/ZrO 2 dielectrics for 60 nm and below DRAMs von Cho, Ho Jin, Kim, Young Dae, Park, Dong Su, Lee, Euna, Park, Cheol Hwan, Jang, Jun Soo, Lee, Keum Bum, Kim, Hai Won, Ki, Young Jong, Han, Il Keun, Song, Yong Wook

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VERTICAL SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE VERTICAL SEMICONDUCTOR DEVICE von PARK, In-Su, KIM, Hai-Won, KIM, Jong-Gi, JEONG, Hoe-Min

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Vertical semiconductor device and method for fabricating the vertical semiconductor device von Kim, Jong-Gi, Jeong, Hoe-Min, Park, In-Su, Kim, Hai-Won

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VERTICAL SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME von KIM HAI WON, KIM JONG GI, PARK IN SU, JEONG HOE MIN

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Cyclic deposition method for thin film and manufacturing method for semiconductor, and semiconductor device von Kim Hai-Won, Kim Seok-Yun

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CYCLIC DEPOSITION METHOD FOR THIN FILM AND MANUFACTURING METHOD FOR SEMICONDUCTOR, AND SEMICONDUCTOR DEVICE von KIM, HAI-WON, KIM, SEOK-YUN

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Substrate supporting unit and substrate processing apparatus manufacturing method of the substrate supporting unit von Kim Hai Won, Cho Sung-Kil

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VERTICAL SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE VERTICAL SEMICONDUCTOR DEVICE von Hoe-Min JEONG, Hai-Won KIM, Jong-Gi KIM, In-Su PARK

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VERTICAL SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE VERTICAL SEMICONDUCTOR DEVICE von PARK, In-Su, KIM, Hai-Won, KIM, Jong-Gi, JEONG, Hoe-Min

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