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  1. 1
    MANUFACTURING METHOD OF NANO- AND MICRO-SIZED SYSTEM OF SENSOR OF PHYSICAL VALUES WITH SPECIFIED POSITIVE TEMPERATURE COEFFICIENT OF RESISTANCE OF RESISTIVE ELEMENTS

    MANUFACTURING METHOD OF NANO- AND MICRO-SIZED SYSTEM OF SENSOR OF PHYSICAL VALUES WITH SPECIFIED POSITIVE TEMPERATURE COEFFICIENT OF RESISTANCE OF RESISTIVE ELEMENTS von VASIL'EV VALERIJ ANATOL'EVICH, KHOSHEV ALEKSANDR VJACHESLAVOVICH

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  2. 2
    METHOD TO MANUFACTURE THIN-FILM NANO AND MICROELECTROMECHANICAL SYSTEM OF HIGH TEMPERATURE SENSOR OF MECHANICAL VALUES

    METHOD TO MANUFACTURE THIN-FILM NANO AND MICROELECTROMECHANICAL SYSTEM OF HIGH TEMPERATURE SENSOR OF MECHANICAL VALUES von VASIL'EV VALERIJ ANATOL'EVICH, KHOSHEV ALEKSANDR VJACHESLAVOVICH

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  3. 3
    METHOD OF MANUFACTURING OF HEAT-RESISTANT NANO AND MICROELECTROMECHANICAL SYSTEM OF MECHANICAL VALUE TRANSMITTER

    METHOD OF MANUFACTURING OF HEAT-RESISTANT NANO AND MICROELECTROMECHANICAL SYSTEM OF MECHANICAL VALUE TRANSMITTER von VASIL'EV VALERIJ ANATOL'EVICH, KHOSHEV ALEKSANDR VJACHESLAVOVICH, CHEBURAKHIN IGOR' NIKOLAEVICH

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  4. 4
    METHOD OF MANUFACTURING OF THIN FILM NANO- AND MICROELECTROMECHANICAL SYSTEM OF MECHANICAL VALUES TRANSMITTER

    METHOD OF MANUFACTURING OF THIN FILM NANO- AND MICROELECTROMECHANICAL SYSTEM OF MECHANICAL VALUES TRANSMITTER von TIMAKOV SERGEJ VLADIMIROVICH, VASIL'EV VALERIJ ANATOL'EVICH, KHOSHEV ALEKSANDR VJACHESLAVOVICH

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