Chemical vapor deposition of metal borides: 6. The formation of neodymium boride thin film materials from polyhedral boron clusters and metal halides by chemical vapor deposition von Kher, Shreyas S., Romero, Jennifer V., Caruso, John D., Spencer, James T.

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A Straightforward, New Method for the Synthesis of Nanocrystalline GaAs and GaP von Kher, Shreyas S, Wells, Richard L

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CHEMICAL VAPOR DEPOSITION OF METAL BORIDES: 7. THE RELATIVELY LOW TEMPERATURE FORMATION OF CRYSTALLINE LANTHANUM HEXABORIDE THIN FILMS FROM BORON HYDRIDE CLUSTER COMPOUNDS BY CHEMI... von Kher, Shreyas S, Spencer, James T

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Chemical vapor deposition precursor chemistry. 2. Formation of pure aluminum, alumina, and aluminum boride thin films from boron-containing precursor compounds by chemical vapor de... von Glass, John A, Kher, Shreyas S, Spencer, James T

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Chemical vapor deposition precursor chemistry. 3. Formation and characterization of crystalline nickel boride thin films from the cluster-assisted deposition of polyhedral borane c... von Kher, Shreyas S, Spencer, James T

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Determination of Relevant Size Parameters for Sonicated and Unsonicated Nanocrystalline GaAs Particles von Hagan, Carolynne R. S, Kher, Shreyas S, Halaoui, Lara I, Wells, Richard L, Coury, Louis A

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Synthesis of Nanocrystalline Indium Arsenide and Indium Phosphide from Indium(III) Halides and Tris(trimethylsilyl)pnicogens. Synthesis, Characterization, and Decomposition Behavio... von Wells, Richard L, Aubuchon, Steven R, Kher, Shreyas S, Lube, Michael S, White, Peter S

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Synthesis of nanocrystalline indium arsenide and indium phosphide from indium(III) halides and tris(trimethylsilyl)pnicogens. Synthesis, characterization, and decomposition behavio... von WELLS, R. L, AUBUCHON, S. R, KHER, S. S, LUBE, M. S, WHITE, P. S

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Deposition and characterization of HfO 2 high k dielectric films von Lo, Wai, Kamath, Arvind, Kher, Shreyas, Metzner, Craig, Wen, Jianguo, Chen, Zhihao

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ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTOR MANUFACTURING von MORADIAN, Ala, SHAH, Kartik B, MEIROVICH, Sergey, TREJO, Orlando, KHER, Shreyas Suresh, KELKAR, Umesh Madhav, NEVILLE, Elizabeth

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Deposition and characterization of HfO2 high k dielectric films von Lo, Wai, Kamath, Arvind, Kher, Shreyas, Metzner, Craig, Wen, Jianguo, Chen, Zhihao

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ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTOR MANUFACTURING von Shah, Kartik B, Neville, Elizabeth, Moradian, Ala, Kelkar, Umesh Madhav, Kher, Shreyas Suresh, Trejo, Orlando, Meirovich, Sergey

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ECO-EFFICIENCY MONITORING AND EXPLORATION PLATFORM FOR SEMICONDUCTOR MANUFACTURING von MORADIAN, Ala, SHAH, Kartik B, MEIROVICH, Sergey, TREJO, Orlando, KHER, Shreyas Suresh, KELKAR, Umesh Madhav, NEVILLE, Elizabeth

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Development of 300mm MOCVD HfSiOx Process von Shi, Xiaoping, Schaekers, Marc, Date, Lucien, Rothschild, Aude, Everaert, Jean-Luc, Van Elshocht, Sven, Rosseel, Erik, Kher, Shreyas

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Hardware set for growth of high k and capping material films von Kher, Shreyas

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Hardware set for growth of high k and capping material films von KHER SHREYAS

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HARDWARE SET FOR GROWTH OF HIGH K & CAPPING MATERIAL FILMS von KHER SHREYAS

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CHEMICAL VAPOR DEPOSITION OF METAL BORIDES von Kher, Shreyas S, Spencer, James T

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반도체 제조를 위한 생태 효율성 모니터링 및 탐색 플랫폼 von MORADIAN ALA, NEVILLE ELIZABETH, MEIROVICH SERGEY, KHER SHREYAS SURESH, KELKAR UMESH MADHAV, TREJO ORLANDO, SHAH KARTIK B

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A HARDWARE SET FOR GROWTH OF HIGH K AND CAPPING MATERIAL FILMS von KHER, SHREYAS, S

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