Superconductor integrated circuit fabrication technology von Abelson, L.A., Kerber, G.L.

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Fabrication of Submicrometer High Current Density Nb/Al-AlNx/Nb Junctions von KERBER, G. L, KLEINSASSER, A. W, BUMBLE, B

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An improved NbN integrated circuit process featuring thick NbN ground plane and lower parasitic circuit inductances von Kerber, G.L., Abelson, L.A., Elmadjian, R.N., Hanaya, G., Ladizinsky, E.G.

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A high density 4 kA/cm(2) Nb integrated circuit process von Kerber, G L, Abelson, L A, Leung, M L, Herr, Q P, Johnson, M W

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Manufacturability of superconductor electronics for a petaflops-scale computer von Abelson, L.A., Herr, Q.P., Kerber, G.L., Leung, M., Tighe, T.S.

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Full-scale integration of superconductor electronics for petaflops computing von Abelson, L A, Herr, Q P, Kerber, G L, Leung, M, Tighe, T S

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Next generation Nb superconductor integrated circuit process von Abelson, L.A., Elmadjian, R.N., Kerber, G.L.

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Characteristics of junctions and resistors fabricated using an all-NbN superconductor integrated circuit foundry process von Kerber, G.L., Abelson, L.A., Elmadjian, R.N., Ladizinsky, E.G.

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Fabrication of high current density Nb integrated circuits using a self-aligned junction anodization process von Kerber, G.L., Abelson, L.A., Edwards, K., Hu, R., Johnson, M.W., Leung, M.L., Luine, J.

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Superconductive multi-chip module process for high speed digital applications von Abelson, L.A., Elmadjian, R.N., Kerber, G.L., Smith, A.D.

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Sputter deposition conditions and penetration depth in NbN thin films von Hu, R., Kerber, G.L., Luine, J., Ladizinsky, E., Bulman, J.

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An all refractory NbN Josephson junction medium scale integrated circuit process von KERBER, G. L, COOPER, J. E, FRY, H. W, KING, G. R, MORRIS, R. S, SPARGO, J. W, TOTH, A. G

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Fabrication of Submicrometer High Current Density hbox Nb / Al - AlN rm x / hbox Nb Junctions von Kerber, G L, Kleinsasser, A W, Bumble, B

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NbN/MgO/NbN Josephson tunnel junctions fabricated on thin underlayers of MgO von Kerber, G.L., Cooper, J.E., Morris, R.S., Spargo, J.W., Toth, A.G.

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Laser patterning of YBaCuO weak link bridges von Wiener-Avnear, E., Cooper, J.E., Kerber, G.L., Spargo, J.W., Toth, A.G., Josefowicz, J.Y., Rensch, D.B., Clemens, B.M., Hunter, A.T.

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Submicrometer rm Nb / rm Al - rm AlO rm x / rm Nb Integrated Circuit Fabrication Process for Quantum | Computing Applications von Bumble, B, Fung, A, Kaul, AB, Kleinsasser, A W, Kerber, G L, Bunyk, P, Ladizinsky, E

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A 60-GHz NbN single-flux quantum counter circuit von Spargo, J.W., Cooper, J.E., Kerber, G.E., King, G.R., Morris, R.S., Toth, A.G.

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A high density 4 kA/cm super(2) Nb integrated circuit process von Kerber, G L, Abelson, L A, Leung, M L, Herr, Q P, Johnson, M W

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A simple method for fabricating lines of 0.15-μ width using optical lithography von Jelks, E. C., Kerber, G. L., Wilcox, H. A.

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I n   s i t u laser deposition of Y1Ba2Cu3O7− x high T c superconducting thin films with SrTiO3 underlayers von Wiener-Avnear, E., Kerber, G. L., McFall, J. E., Spargo, J. W., Toth, A. G.

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