High resolution energy analyzer for broad ion beam characterization von Kanarov, V., Siegfried, D., Sferlazzo, P., Hayes, A., Yevtukhov, R.

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Ion source for ion beam deposition employing a novel electrode assembly von Hayes, A. V., Kanarov, V., Yevtukhov, R., Hegde, H., Druz, B., Yakovlevitch, D., Cheesman, W., Mirkov, V.

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Investigation of a rf inductively coupled plasma ion source capableof highly uniform and collimated ion-beam generation von Kanarov, V., Hayes, A., Yevtukhov, R., Kameyama, I., Siegfried, D., Wåhlin, E.

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Investigation of a rf inductively coupled plasma ion source capable of highly uniform and collimated ion-beam generation von Kanarov, V., Hayes, A., Yevtukhov, R., Kameyama, I., Siegfried, D., Wåhlin, E.

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Nitrogenated carbon films deposited using filtered cathodic arc von Druz, B., Yevtukhov, Y., Novotny, V., Zaritsky, I., Kanarov, V., Polyakov, V., Rukavishnikov, A.

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Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source von Druz, B., Ostan, E., Distefano, S., Hayes, A., Kanarov, V., Polyakov, V., Rukovishnikov, A., Rossukanyi, N., Khomich, A.

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Recent advances in Veeco’s radio frequency ion sources for ion beam materials processing applications (abstract) von Hayes, A. V., Kanarov, V., Yevtukhov, R., Williams, K., Hines, D., Druz, B., Hegde, H.

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On the theory of the formation of the final charge state of Ar and Ne atoms scattered by surfaces of Ag and Pd polycrystals von Alimov, RA, Alimov, ShA, Kanarov, VYa, Matveev, VI

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Fifty centimeter ion beam sourcea von Hayes, A. V., Kanarov, V., Vidinsky, B.

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Fifty centimeter ion beam source (abstract)a von Hayes, A. V., Kanarov, V., Vidinsky, B.

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Thirty-five centimeter diameter radio frequency ion-beam source von Kanarov, V., Hayes, A. V., Yevtukhov, R., Vidinsky, B., Navy, A.

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Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH 4-plasma source von Druz, B., Ostan, E., Distefano, S., Hayes, A., Kanarov, V., Polyakov, V., Rukovishnikov, A., Rossukanyi, N., Khomich, A.

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On the Theory of the Formation of the Final Charge State of Argon and Neon Atoms Scattered by Surfaces of Silver and Palladium Polycrystals von Alimov, R A, Alimov, S H A, Kanarov, V A, Matveev, V I

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Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source von DRUZ, B, OSTAN, E, DISTEFANO, S, HAYES, A, KANAROV, V, POLYAKOV, V, RUKOVISHNIKOV, A, ROSSUKANYI, N, KHOMICH, A

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ION SOURCES AND METHODS OF OPERATING AN ELECTROMAGNET OF AN ION SOURCE von VIKTOR KANAROV, ALAN V. HAYES, RUSTAM, YEVTUKHOV, BORIS L. DRUZ

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Ion sources and methods for generating an ion beam with controllable ion current density distribution von DRUZ BORIS L, HAYES ALAN V, YEVTUKHOV RUSTAM, KANAROV VIKTOR

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Methods of operating an electromagnet of an ion source von YEVTUKHOV, RUSTAM, KANAROV, VIKTOR, DRUZ, BORIS, L, HAYES, ALAN, V

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METHOD AND APPARATUS FOR SURFACE PROCESSING OF A SUBSTRATE USING AN ENERGETIC PARTICLE BEAM von DRUZ BORIS L, SFERLAZZO PIERO, FREMGEN ROGER P, HAYES ALAN V, REISS IRA, KANAROV VIKTOR, KRAUSE ROBERT

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ION SOURCES AND METHODS FOR GENERATING AN ION BEAM WITH CONTROLLABLE ION CURRENT DENSITY DISTRIBUTION von DRUZ BORIS L, HAYES ALAN V, YEVTUKHOV RUSTAM, KANAROV VIKTOR

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Method and apparatus for surface processing of a substrate using an energetic particle beam von DRUZ BORIS, SFERLAZZO PIERO, FREMGEN, JR. ROGER P, HAYES ALAN V, REISS IRA, KANAROV VIKTOR, KRAUSE ROBERT

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