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  1. 1
    Copper Filling of Deep Submicrometer Trenches with Cobalt-Lined Barrier Metal Produced by High-Vacuum Magnetron Sputtering by Using supercritical Carbon Dioxide Method

    Copper Filling of Deep Submicrometer Trenches with Cobalt-Lined Barrier Metal Produced by High-Vacuum Magnetron Sputtering by Using supercritical Carbon Dioxide Method von OHNO, Yasunori, ITOH, Masatoshi, NUMAKAWA, Tomonori, KAMIUTTANAI, Kota, OTAKE, Katsuto, SAITO, Shigeru

    Veröffentlicht in Shinkū

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  2. 2
    Copper Filling of Deep Submicrometer Trenches with Cobalt-Lined Barrier Metal Produced by High-Vacuum Magnetron Sputtering by Using supercritical Carbon Dioxide Method

    Copper Filling of Deep Submicrometer Trenches with Cobalt-Lined Barrier Metal Produced by High-Vacuum Magnetron Sputtering by Using supercritical Carbon Dioxide Method von OHNO, Yasunori, ITOH, Masatoshi, NUMAKAWA, Tomonori, KAMIUTTANAI, Kota, OTAKE, Katsuto, SAITO, Shigeru


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  3. 3
    高真空スパッタ法で作製された Co バリア層付きトレンチへの超臨界 CO2 法による Cu 埋め込み

    高真空スパッタ法で作製された Co バリア層付きトレンチへの超臨界 CO2 法による Cu 埋め込み von 大野, 泰典, 伊藤, 勝利, 沼川, 智則, 上打田内, 康太, 大竹, 勝人, 斉藤, 茂


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