Via structures and via patterning using oblique angle deposition processes von K M Mahalingam, Anbu Selvam, Takmeel, Qanit, Child, Craig M, Ghosh, Somnath, Singh, Sunil K

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VIA STRUCTURES AND VIA PATTERNING USING OBLIQUE ANGLE DEPOSITION PROCESSES von SINGH, Sunil K, GHOSH, Somnath, K M MAHALINGAM, Anbu Selvam, TAKMEEL, Qanit, CHILD, Craig M

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Multi-directional self-aligned multiple patterning von He, Ming, KM Mahalingam, Anbu Selvam, Bombardier, Colin, Chauhan, Vikrant, Donegan, Keith

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MULTI-DIRECTIONAL SELF-ALIGNED MULTIPLE PATTERNING von He, Ming, KM Mahalingam, Anbu Selvam, Bombardier, Colin, Chauhan, Vikrant, Donegan, Keith

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Substrate structure with spatial arrangement configured for coupling of surface plasmons to incident light von He, Ming, KM Mahalingam, Anbu Selvam, Bombardier, Colin, Donegan, Keith P, Ramanathan, Eswar, Sarad, Jeric, Takmeel, Qanit, Ghosh, Somnath, Periasamy, Prakash, Chandrashekar, Ashwini

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DEVICES AND METHODS OF REDUCING DAMAGE DURING BEOL M1 INTEGRATION von KM MAHALINGAM Anbu Selvam, CHILD, JR. Craig Michael, CHANDRASHEKAR Ashwini

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SUBSTRATE STRUCTURE WITH SPATIAL ARRANGEMENT CONFIGURED FOR COUPLING OF SURFACE PLASMONS TO INCIDENT LIGHT von He, Ming, KM Mahalingam, Anbu Selvam, Bombardier, Colin, Donegan, Keith P, Ramanathan, Eswar, Sarad, Jeric, Takmeel, Qanit, Ghosh, Somnath, Periasamy, Prakash, Chandrashekar, Ashwini

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Devices with chamfer-less vias multi-patterning and methods for forming chamfer-less vias von Stephens, Jason Eugene, Augur, Roderick Alan, Zaleski, Mark, Jang, Linus, K M Mahalingam, Anbu Selvam, Wei, Andy, Sehgal, Akshey, Permana, David Michael, Bouche, Guillaume, Child, Jr., Craig Michael, Pal, Shyam, Hu, Xiang

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Multi-directional self-aligned multiple patterning von BOMBARDIER, COLIN, KM MAHALINGAM, ANBU SELVAM, CHAUHAN, VIKRANT, HE, MING, DONEGAN, KEITH

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DEVICES WITH CHAMFER-LESS VIAS MULTI-PATTERNING AND METHODS FOR FORMING CHAMFER-LESS VIAS von WEI, Andy, STEPHENS, Jason Eugene, ZALESKI, Mark, KM MAHALINGAM, Anbu Selvam, PAL, Shyam, BOUCHE, Guillaume, AUGUR, Roderick Alan, HU, Xiang, CHILD, JR., Craig Michael, PERMANA, David Michael, SEHGAL, Akshey, JANG, Linus

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Multi-directional self-aligned multiple patterning von BOMBARDIER, COLIN, KM MAHALINGAM, ANBU SELVAM, CHAUHAN, VIKRANT, HE, MING, DONEGAN, KEITH

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Devices with chamfer-less vias multi-patterning and methods for forming chamfer-less vias von JANG, LINUS, BOUCHE, GUILLAUME, HU, XIANG, WEI, ANDY, SEHGAL, AKSHEY, KM MAHALINGAM, ANBU SELVAM, AUGUR, RODERICK ALAN, CHILD JR., CRAIG MICHAEL, STEPHENS, JASON EUGENE, ZALESKI, MARK, PAL, SHYAM, PERMANA, DAVID MICHAEL

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MULTI-DIRECTIONAL SELF-ALIGNED MULTIPLE PATTERNING von BOMBARDIER, COLIN, MAHALINGAM ANBU SELVAM KM, CHAUHAN, VIKRANT, HE, MING, DONEGAN, KEITH

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Devices with chamfer-less vias multi-patterning and methods for forming chamfer-less vias von JANG, LINUS, BOUCHE, GUILLAUME, HU, XIANG, WEI, ANDY, SEHGAL, AKSHEY, KM MAHALINGAM, ANBU SELVAM, AUGUR, RODERICK ALAN, CHILD JR., CRAIG MICHAEL, STEPHENS, JASON EUGENE, ZALESKI, MARK, PAL, SHYAM, PERMANA, DAVID MICHAEL

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DEVICES WITH CHAMFER-LESS VIAS MULTI-PATTERNING AND METHODS FOR FORMING CHAMFER-LESS VIAS von MARK ZALESKI, JASON EUGENE STEPHENS, CRAIG MICHAEL CHILD JR, AKSHEY SEHGAL, SHYAM PAL, XIANG HU, DAVID MICHAEL PERMANA, ANDY WEI, RODERICK ALAN AUGUR, ANBU SELVAM KM MAHALINGAM, GUILLAUME BOUCHE, LINUS JANG

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