Wafer-level membrane transfer bonding of polycrystalline silicon bolometers for use in infrared focal plane arrays von Niklaus, Frank, Kälvesten, Edvard, Stemme, Göran

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Low-temperature full wafer adhesive bonding von Niklaus, Frank, Enoksson, Peter, Kälvesten, Edvard, Stemme, Göran

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Dynamic actuation of polyimide V-groove joints by electrical heating von Ebefors, Thorbjörn, Kälvesten, Edvard, Stemme, Göran

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A new silicon gas-flow sensor based on lift force von Svedin, N., Kalvesten, E., Stemme, E., Stemme, G.

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Low-temperature wafer-level transfer bonding von Niklaus, F., Enoksson, P., Griss, P., Kalvesten, E., Stemme, G.

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A new edge-detected lift force flow sensor von Svedin, N., Kalvesten, E., Stemme, G.

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New small radius joints based on thermal shrinkage of polyimide in V-grooves for robust self-assembly 3D microstructures von Ebefors, Thorbjörn, Kälvesten, Edvard, Stemme, Göran

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A robust micro conveyer realized by arrayed polimide joint actuators von EBEFORS, T, MATTSSON, J. U, KÄLVESTEN, E, STEMME, G

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New CO2 filters fabricated by anodic bonding at overpressure in CO2 atmosphere von CORMAN, T, KÄLVESTEN, E, HUIKU, M, WECKSTRÖM, K, MERILÄINEN, P, STEMME, G

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A surface-micromachined resonant-beam pressure-sensing structure von Melvas, P., Kalvesten, E., Stemme, G.

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Media protected surface micromachined leverage beam pressure sensor von Melvås, Patrik, Kälvesten, Edvard, Stemme, Göran

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A method to maintain wafer alignment precision during adhesive wafer bonding von Niklaus, Frank, Enoksson, Peter, Kälvesten, Edvard, Stemme, Göran

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A lift-force flow sensor designed for acceleration insensitivity von Svedin, Niklas, Kälvesten, Edvard, Stemme, Erik, Stemme, Göran

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Small piezoresistive silicon microphones specially designed for the characterization of turbulent gas flows von Kälvesten, Edvard, Löfdahl, Lennart, Stemme, Göran

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A small-size silicon microphone for measurements in turbulent gas flows von Kälvesten, Edvard, Löfdahl, Lennart, Stemme, Göran

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Small silicon based pressure transducers for measurements in turbulent boundary layers von LÖFDAHL, L, KÄLVESTEN, E, STEMME, G

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A lift force sensor with integrated hot-chips for wide range flow measurements von Svedin, Niklas, Kälvesten, Edvard, Stemme, Göran

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A temperature compensated dual beam pressure sensor von Melvås, Patrik, Kälvesten, Edvard, Stemme, Göran

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An optical IR-source and CO/sub 2/-chamber system for CO/sub 2/ measurements von Corman, T., Kalvesten, E., Huiku, M., Weckstrom, K., Merilainen, P.T., Stemme, G.

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A free-hanging strain-gauge for ultraminiaturized pressure sensors von Melvås, Patrik, Kälvesten, Edvard, Enoksson, Peter, Stemme, Göran

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