High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region von Lin, Hui, Zhang, Lichao, Li, Lifeng, Jin, Chunshui, Zhou, Hongjun, Huo, Tonglin

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Design method for off-axis aspheric reflective optical system with extremely low aberration and large field of view von Wu, Yue, Wang, Liping, Yu, Jie, Yu, Bo, Jin, Chunshui

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Broadband multilayer-coated normal incidence blazed grating with ∼10% diffraction efficiency through the 13-16 nm wavelength region von Zhang, Lichao, Lin, Hui, Jin, Chunshui, Zhou, Hongjun, Huo, Tonglin

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Method of optimizing deterministic small free-form surfaces for off-axis optical systems with extremely low aberration von Zhang, Xu, Yu, Jie, Wang, Liping, Jin, Chunshui

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Design method for an off-axis reflective anamorphic optical system with aberration balance and constraint control von Wu, Yue, Wang, Liping, Zhang, Xu, Yu, Jie, Yu, Bo, Jin, Chunshui

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Design of tilted and decentered anamorphic optical system based on nodal aberration control von Zhang, Xu, Wang, Liping, Yu, Jie, Jin, Chunshui

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Plasma-ion-assisted deposition of HfO2 films with low UV absorption von Deng, Wenyuan, Jin, Chunshui, Li, Chun, Yao, Shun, Yu, Bo, Liu, Yu

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Square optical vortices generated by binary spiral zone plates von Gao, Nan, Xie, Changqing, Li, Chun, Jin, Chunshui, Liu, Ming

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Extended shift-rotation method for absolute interferometric testing of a spherical surface with pixel-level spatial resolution von Liu, Yu, Miao, Liang, Zhang, Wenlong, Jin, Chunshui, Zhang, Haitao

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Mo/Si multilayers sputtered onto inclined substrates: experiments and simulations von Sun, Shizhuang, Yu, Bo, Guo, Tao, Yao, Shun, Liu, Yu, Deng, Wenyuan, Li, Chun, Jin, Chunshui

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Low-stress and high-reflectance Mo/Si multilayers for extreme ultraviolet lithography by magnetron sputtering deposition with bias assistance von Yu, Bo, Jin, Chunshui, Yao, Shun, Li, Chun, Liu, Yu, Zhou, Feng, Guo, Benyin, Wang, Hui, Xie, Yao, Wang, Liping

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Influence of substrate temperatures on the properties of GdF sub(3) thin films with quarter-wave thickness in the ultraviolet region von Jin, Jingcheng, Jin, Chunshui, Li, Chun, Deng, Wenyuan, Yao, Shun

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Influence of substrate temperatures on the properties of GdF_3 thin films with quarter-wave thickness in the ultraviolet region von Jin, Jingcheng, Jin, Chunshui, Li, Chun, Deng, Wenyuan, Yao, Shun

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Control of lateral thickness gradients of Mo-Si multilayer on curved substrates using genetic algorithm von Yu, Bo, Jin, Chunshui, Yao, Shun, Li, Chun, Wang, Hui, Zhou, Feng, Guo, Benyin, Xie, Yao, Liu, Yu, Wang, Liping

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Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68°-74°) von Jin, Jingcheng, Jin, Chunshui, Li, Chun, Deng, Wenyuan, Chang, Yanhe

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Fabrication antireflection (AR) coatings for P-polarized 193nm laser light at an incidence angle of 74 von Jin, Jingcheng, Jin, Chunshui, Li, Chun, Chang, Yanhe

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Fabrication antireflection (AR) coatings for P-polarized 193 nm laser light at an incidence angle of 74 degree von Jin, Jingcheng, Jin, Chunshui, Li, Chun, Chang, Yanhe

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Development Status and Trend of China’s Excimer Laser Technology von Fan, Yuanyuan, Zhou, Yi, Guo, Xin, Wang, Qian, Jin, Chunshui, Lou, Qihong

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Broadband multilayer-coated normal incidence blazed grating with approximately 10% diffraction efficiency through the 13-16 nm wavelength region von Zhang, Lichao, Lin, Hui, Jin, Chunshui, Zhou, Hongjun, Huo, Tonglin

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Fabrication Fluoride High Reflection Mirror by Thermal Evaporation in the ArF Excimer Laser von Jin, Jing Cheng, Chang, Yan He, Li, Chun, Jin, Chun Shui

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