Fabrication of MEMS-based capacitive silicon microphone structure with staircase contour cavity using multi-film thickness mask von Jantawong, Jirawat, Atthi, Nithi, Leepattarapongpan, Chana, Srisuwan, Awirut, Jeamsaksiri, Wutthinan, Sooriakumar, Kathirgamasundaram, Austin, Anu, Niemcharoen, Surasak

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Improvement of Poly-Si Wet Etching for Fusion Bonding of MEMS Pressure Sensor von Jantawong, Jirawat, Atthi, Nithi, Pankiew, Apirak, Leepattarapongpan, Chana, Sooriakumar, Kathirgamasundaram, Jeamsaksiri, Wutthinan, Hruanun, Charndet

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Fabrication of Multi-Level Photoresist Patterns in One-Step Lithography by Using Cr/Ni Multi-Film Thickness Mask von Poyai, Amporn, Leksakul, Komgrit, Atthi, Nithi, Porntheeraphat, Supanit, Jantawong, Jirawat, Siwarakrangsun, Narongchai

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A ±60° Field-of-View, highly compact, 3×3 integrated photo-diode array sensor for dual-axis solar tracking von Tosanguan, Thanut, Supadech, Jakrapong, Jantawong, Jirawat, Hruanun, Charndet, Poyai, Amporn

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