Guidelines for etching silicon MEMS structures using fluorine high-density plasmas at cryogenic temperatures von de Boer, M.J., Gardeniers, J.G.E., Jansen, H.V., Smulders, E., Gilde, M.-J., Roelofs, G., Sasserath, J.N., Elwenspoek, M.

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Polymeric microsieves produced by phase separation micromolding von Gironès, M., Akbarsyah, I.J., Nijdam, W., van Rijn, C.J.M., Jansen, H.V., Lammertink, R.G.H., Wessling, M.

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Micromachining of buried micro channels in silicon von de Boer, M.J., Tjerkstra, R.W., Berenschot, J.W., Jansen, H.V., Burger, G.J., Gardeniers, J.G.E., Elwenspoek, M., van den Berg, A.

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Preparation of palladium–silver alloy films by a dual-sputtering technique and its application in hydrogen separation membrane von Tong, H.D., vanden Berg, A.H.J., Gardeniers, J.G.E., Jansen, H.V., Gielens, F.C., Elwenspoek, M.C.

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Microfabrication of palladium-silver alloy membranes for hydrogen separation von Hien Duy Tong, Berenschot, J.W.E., De Boer, M.J., Gardeniers, J.G.E., Wensink, H., Jansen, H.V., Nijdam, W., Elwenspoek, M.C., Gielens, F.C., van Rijn, C.J.M.

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Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation von Hien Duy Tong, Gielens, F.C., Gardeniers, J.G.E., Jansen, H.V., Berenschot, J.W., de Boer, M.J., de Boer, J.H., van Rijn, C.J.M., Elwenspoek, M.C.

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Characterization of a planar microcoil for implantable microsystems von Neagu, C.R., Jansen, H.V., Smith, A., Gardeniers, J.G.E., Elwenspoek, M.C.

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Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers von Rusu, C., van't Oever, R., de Boer, M.J., Jansen, H.V., Berenschot, J.W., Bennink, M.L., Kanger, J.S., de Grooth, B.G., Elwenspoek, M., Greve, J., Brugger, J., van den Berg, A.

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Tuning a racetrack ring resonator by an integrated dielectric MEMS cantilever von Abdulla, S M C, Kauppinen, L J, Dijkstra, M, de Boer, M J, Berenschot, E, Jansen, H V, de Ridder, R M, Krijnen, G J M

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Applications of fluorocarbon polymers in micromechanics and micromachining von Jansen, H.V., Gardeniers, J.G.E., Elders, J., Tilmans, H.A.C., Elwenspoek, M.

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Fabrication and characterization of dual sputtered Pd–Cu alloy films for hydrogen separation membranes von Hoang, H.T, Tong, H.D, Gielens, F.C, Jansen, H.V, Elwenspoek, M.C

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Microfabricated Palladium−Silver Alloy Membranes and Their Application in Hydrogen Separation von Tong, H. D., Gielens, F. C., Gardeniers, J. G. E., Jansen, H. V., van Rijn, C. J. M., Elwenspoek, M. C., Nijdam, W.

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Etching methodologies in [left angle bracket]111[right angle bracket]-oriented silicon wafers von Oosterbroek, R.E, Berenschot, J.W, Jansen, H.V, Nijdam, A.J, Pandraud, G, van den Berg, A, Elwenspoek, M.C

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Fabrication of thick silicon nitride blocks for integration of RF devices von FERNANDEZ, L. J, BERENSCHOT, E, SESE, J, WIEGERINK, R. J, FLOKSTRA, J, JANSEN, H. V, ELWENSPOEK, M

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Etching methodologies in -oriented silicon wafers von Oosterbroek, R.E., Berenschot, J.W., Jansen, H.V., Nijdam, A.J., Pandraud, G., van den Berg, A., Elwenspoek, M.C.

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3D-nanomachining using corner lithography von Berenschot, E., Tas, N.R., Jansen, H.V., Elwenspoek, M.

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Microfluidics within a Swagelok®: A MEMS-on-Tube Assembly von Unnikrishnan, S., Jansen, H.V., Berenschot, J.W., Mogulkoc, B., Elwenspoek, M.C.

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Fabrication of dense flow sensor arrays on flexible membranes von Izadi, N., de Boer, M.J., Berenschot, J.W., Wiegerink, R.J., Lammerink, T.S.J., Jansen, H.V., Mogdans, J., Krijnen, G.J.M.

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Simple Technique for Direct Patterning of Nanowires using a Nanoslit Shadow-Mask von Tong, H.D., Jansen, H.V., Tas, N.R., Gadgil, V.J., Carlen, E.T., van den Berg, A.

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Bulk micromachining technology for fabrication of two-level MEMS in standard silicon substrate von Sarajlic, E., de Boer, M.J., Jansen, H.V., Arnal, N., Puech, M., Krijnen, G., Elwenspoek, M.

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