Super-Resolution Fluorescence Imaging for Semiconductor Nanoscale Metrology and Inspection von Nguyen, Duyen Thi, Mun, Seohyun, Park, HyunBum, Jeong, Uidon, Kim, Geun-ho, Lee, Seongsil, Jun, Chung-Sam, Sung, Myung Mo, Kim, Doory

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Determination of the Absolute Thickness of Ultrathin Al2O3 Overlayers on Si (100) Substrate von Kim, Kyung Joong, Jang, Jong Shik, Lee, Joo-Hee, Jee, Yun-Jung, Jun, Chung-Sam

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Characterization of residual implant damage by generation time technique von Jee, Yun-Jung, Kim, Chun-Yong, Jun, Chung-Sam, Kim, Tae-Sung, Belyaev, Anton, Marinskiy, Dmitriy

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The Development of the Non-contact Electrical Leakage Property Measurement System for the High-K Dielectric Materials on DRAM Capacitors von Yusin Yang, Byung Sug Lee, Misung Lee, Chung Sam Jun, Tae Sung Kim

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Fast, exact and non-destructive diagnoses of contact failures in nano-scale semiconductor device using conductive AFM von Shin, ChaeHo, Kim, Kyongjun, Kim, JeongHoi, Ko, Wooseok, Yang, Yusin, Lee, SangKil, Jun, Chung Sam, Kim, Youn Sang

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Small angle x-ray scattering (SAXS) and Q-space weighting filter for ×3 CD-extraction accuracy improvement von Tsuji, Yukihide, Kim, Doyun, Yoo, Gwangsu, Hwang, ByungHyun, Kim, Kwanghoon, Lee, Donhwan, Sasai, Yoshinori, Yi, Shinwook, Jeong, Jaehoon, Ihm, Dongchul, Jun, ChungSam, Kim, Dae Sin

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Determination of the Absolute Thickness of Ultrathin Al 2 O 3 Overlayers on Si (100) Substrate von Kim, Kyung Joong, Jang, Jong Shik, Lee, Joo-Hee, Jee, Yun-Jung, Jun, Chung-Sam

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Pattern measuring method and pattern measuring system von LEE JIN WOO, JUN CHUNG SAM, LEE BUM JOO, LEE SU YOUNG

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Substrate Inspection Method von OH SEUNG RYEOL, JUN CHUNG SAM, SONG KI WOOK, CHUNG KI HONG

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The novel resveratrol derivative 3,5-diethoxy-3＇,4＇- dihydroxy-trans-stilbene induces mitochondrial ROS-mediated ER stress and cell death in human hepatoma cells in vitro von Park, Jae-woo, Choi, Woo-gyun, Lee, Phil-jun, Chung, Su-wol, Kim, Byung-sam, Chung, Hun-taeg, Cho, Sungchan, Kim, Jong-heon, Kang, Byoung-heon, Kim, Hyoungsu, Kim, Hong-pyo, Back, Sung-hoon

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Automatic defect classification using boosting von Sang Hwa Lee, Hong Il Kim, Nam Ik Cho, Yu Han Jeong, Ki Suk Chung, Chung Sam Jun

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SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE INSPECTION METHOD von LEE JIN WOO, LEE HYEONG CHEOL, JUN CHUNG SAM, SUN JONG CHEON, LEE SU YOUNG, JEON SE KYE

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INSPECITON SYSTEM OF SEMICONDUCTOR WAFER AND METHOD OF DRIVING THE SAME von IHM DONG CHUL, JUN CHUNG SAM, LEE DONG RYUL, YOON DO YOUNG, AHN JEONG HO

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Wafer inspection apparatus and system comprising the same von JUN CHUNG SAM, AHN JEONG HO, LEE SEONG SIL

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METHOD AND SYSTEM FOR PREDICTING THE SHAPE OF SEMICONDUCTOR PATTERN von KIM MIN SIK, JUN CHUNG SAM, CHOI JIN, LEE SU YOUNG

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Method of inspecting pattern defect von Sohn, Young-Hoon, Jun, Chung-Sam, Yang, Yu-Sin

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Semiconductor device measuring device and method for the same von RYOO HYUN WOO, IHM DONG CHUL, JUN CHUNG SAM, LEE DONG RYUL, BYUN JUNG HOON, YOON DA HEE, LEE WOO YUN

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Apparatus and method for inspecting multi-layer structure method for fabricating semiconductor device comprising the method von KIM JUNG WON, RYU SUNG YOON, JUN CHUNG SAM, YANG YU SIN, KWAK HYUN SU

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Ellipsometer and method of inspecting pattern asymmetry using the same von JUN, CHUNG SAM, LEEM, CHOON SHIK

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Development of automated contact inspection system using in-line CD SEM von Sang-Mun Chon, Sang-Bong Choi, Yong-Wan Kim, Kye-Weon Kim, Kyu-Hong Lim, Sun-Yong Choi, Chung-Sam Jun

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