A robust alternative for the DRAM capacitor of 50nm generation von KWANG HEE LEE, CHUNG, Suk-Jin, HAN, Sungho, JANG, Soolk, NAM, Byeong-Yun, YOO, Cha-Young, KIM, Sung-Tae, CHUNG, U-In, MOON, Joo-Tae, RVU, Byune-Il, JIN YONG KIM, KIM, Ki-Chul, LIM, Jae-Soon, CHO, Kyuho, LEE, Jinil, CHUNG, Jeong-Hee, HANJIN LIM, CHOI, Kyungin

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