DEVICE FOR PRESSING ARTICLES OUT OF CONSTRUCTION MIXTURES von JACHMENEV A.V, JACHMENEV V.V, GALIN V.M

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METHOD FOR PLASMA ETCHING OF INSULATING LAYERS von KOLOBOVA L.A, JACHMENEV V.V, ALEKSEEV N.V, EREMENKO A.N, KLYCHNIKOV M.I

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METHOD FOR FORMING VIA-WINDOWS von NOVIKOV A.V, JACHMENEV V.V, KOLOBOVA L.A, ALEKSEEV N.V, EREMENKO A.N

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METHOD FOR REACTIVE ION-PLASMA ETCHING OF TANTALUM, TANTALUM-NITROGEN, AND TANTALUM-ALUMINUM FILMS von JACHMENEV V.V, ALEKSEEV N.V, EREMENKO A.N, KLYCHNIKOV N.I, EREMCHUK A.I

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POLYSILICON AND MONOSILICON REACTIVE ION ETCHING PROCESS von KRASNIKOV G.JA, JACHMENEV V.V, KOLOBOVA L.A, ALEKSEEV N.V, KLYCHNIKOV M.I

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METHOD OF MANUFACTURING INSULATION FOR ELEMENT OF INTEGRATED CIRCUITS von Sulimin A.D, Shurchkov I.O, Jachmenev V.V, Manzha N.M, Kokin V.N

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