Effects of gas flow on detailed microstructure inhomogeneities in LPCVD TiAlN nanolamella coatings von Qiu, Ren, Forslund, Axel, Bäcke, Olof, Iyer, Anand.H.S., Sattari, Mohammad, Janssen, Wiebke, Manns, Thorsten, Kümmel, Johannes, Ruban, Andrei, Stiens, Dirk, Andrén, Hans-Olof, Halvarsson, Mats

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