Treffer 1 - 3 von 3 für Suche 'Inoki, C.K.', Suchdauer: 0,36s Treffer weiter einschränken
  1. 1
    Step formation on hydrogen-etched 6H-SiC{0 0 0 1} surfaces

    Step formation on hydrogen-etched 6H-SiC{0 0 0 1} surfaces von Nie, S., Lee, C.D., Feenstra, R.M., Ke, Y., Devaty, R.P., Choyke, W.J., Inoki, C.K., Kuan, T.S., Gu, Gong

    Veröffentlicht in Surface science

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  2. 2
    Plasma-surface interactions of nanoporous silica during plasma-based pattern transfer using C{sub 4}F{sub 8} and C{sub 4}F{sub 8}/Ar gas mixtures

    Plasma-surface interactions of nanoporous silica during plasma-based pattern transfer using C{sub 4}F{sub 8} and C{sub 4}F{sub 8}/Ar gas mixtures von Hua Xuefeng, Stolz, Christian, Oehrlein, G.S., Lazzeri, P., Coghe, N., Anderle, M., Inoki, C.K., Kuan, T.S., Jiang, P., Department of Materials Science and Engineering and Institute for Research in Electronics and Applied Physics, University of Maryland, College Park, Maryland 20742, ITC-irst, Center for Scientific and Technological Research, 38050 Povo, Trento, Department of Physics, University at Albany, SUNY, Albany, New York 12222, Texas Instruments, Inc., Dallas, Texas 75243


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  3. 3
    Plasma-surface interactions of nanoporous silica during plasma-based pattern transfer using C/sub 4/F/sub 8/ and C/sub 4/F/sub 8//Ar gas mixtures

    Plasma-surface interactions of nanoporous silica during plasma-based pattern transfer using C/sub 4/F/sub 8/ and C/sub 4/F/sub 8//Ar gas mixtures von Xuefang Hua, Stolz, C., Oehrlein, G.S., Lazzeri, P., Coghe, N., Anderle, M., Inoki, C.K., Kuan, T.S., Jiang, P.


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