Micromachining and dicing of sapphire, gallium nitride and micro LED devices with UV copper vapour laser von Gu, E, Jeon, C.W, Choi, H.W, Rice, G, Dawson, M.D, Illy, E.K, Knowles, M.R.H

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Impact of laser scribing for efficient device separation of LED components von Illy, E.K., Knowles, M., Gu, E., Dawson, M.D.

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Microfabrication in free-standing gallium nitride using UV laser micromachining von Gu, E., Howard, H., Conneely, A., O’Connor, G.M., Illy, E.K., Knowles, M.R.H., Edwards, P.R., Martin, R.W., Watson, I.M., Dawson, M.D.

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Enhanced polymer ablation rates using high-repetition-rate ultraviolet lasers von Illy, E.K., Brown, D.J.W., Withford, M.J., Piper, J.A.

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High-speed UV micro-machining of polymers with frequency-doubled copper vapor lasers von Glover, A.C.J., Illy, E.K., Piper, J.A.

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Optimisation of ablation parameters for direct-write micromachining of polymers using high-pulse-rate UV lasers von Illy, E.K., Withford, M.J., Brown, D.J.W., Piper, J.A.

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Direct Write Micromachining Using High Repetition Rate UV Lasers von Illy, E.K., Withford, M.J., Brown, D.J.W., Piper, J.A.

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High-speed microdrilling of polymers using high PRF UV lasers von Illy, E.K., Withford, M.J., Brown, D.J.W., Piper, J.A.

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