Perfluorocompounds emission reduction by the semiconductor industry von Illuzzi, Francesca, Thewissen, Harry

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(Invited) Impact of the Substrate Specifications on the Extended Defects Induced by the Deep Trench Isolation von Mica, Isabella, Monge Roffarello, Pierpaolo, Dutartre, Didier, Basso, Michele, Abbadie, Alexandra, Frascaroli, Jacopo, Tonini, Marta, Livellara, Luisito, Mari, Guido Maria, Bertaiola, Simone, Illuzzi, Francesca

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Silicon Wafer Requirements for ULSI Device Processing von Illuzzi, Francesca

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On the use and limits of mass spectrometry for the characterization of fluorocarbon emission during plasma processing von FRACASSI, Francesco, D'AGOSTINO, Riccardo, ILLUZZI, Francesca

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(Invited) Impact of the Substrate Specifications on the Extended Defects Induced by the Deep Trench Isolation von Mica, Isabella, Monge Roffarello, Pierpaolo, Dutartre, Didier, Basso, Michele, Abbadie, Alexandra, Frascaroli, Jacopo, Tonini, Marta, Livellara, Luisito, Mari, Guido Maria, Bertaiola, Simone, Illuzzi, Francesca

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Airborne molecular contamination: On-line analytical system for real time contamination control von Illuzzi, F., Sonego, P., Landoni, C., Solcia, C., Succi, M., Bacon, T., Webber, K.

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The influence of plasmaparameters on polymerization kinetics and the structure of deposited films von d'Agostino, Riccardo, Fracassi, Francesco, Illuzzi, Francesca

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Mechanisms of deposition and etching of thin films of plasma-polymerized fluorinated monomers in radio frequency discharges fed with C2F6-H2 and C2F6-O2 mixtures von d’Agostino, Riccardo, Cramarossa, Francesco, Illuzzi, Francesca

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FILMS, LAYERS, TAPES, PLATES AND SIMILAR STRUCTURES OF METAL OR PLASTIC MATERIALS COATED WITH THIN POLYFLUOROCARBON FILMS von D'AGOSTINO, RICCARDO, CRAMAROSSA, FRANCESCO, FRACASSI, FRANCESCO, CAPORICCIO, GERARDO, ILLUZZI, FRANCESCA

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Method of coating with polyfluorocarbons von CAPORICCIO, GERARDO, D'AGOSTINO, RICCARDO, ILLUZZI, FRANCESCA, FRACASSI, FRANCESCO, CRAMAROSSA, FRANCESCO

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Films, layers, tapes, plates, and similar structures of metal or of plastic materials, coated with thin polyfluorocarbon films von CAPORICCIO, GERARDO, D'AGOSTINO, RICCARDO, ILLUZZI, FRANCESCA, FRACASSI, FRANCESCO, CRAMAROSSA, FRANCESCO

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FILM,STRATI,NASTRI,LASTRE E STRUTTURE SIMILI DI METALLO O MATERIE PLASTICHE RIVESTITI CON FILM SOTTILI DI POLIFLUOROCARBURI von FRACASSI FRANCESCO, ILLUZZI FRANCESCA, CAPORICCIO GERARDO, D'AGOSTINO RICCARDO, CRAMAROSSO FRANCESCO

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Films, layers, tapes, plates and similar structures of metal or plastic materials coated with thin polyfluorocarbon films von D'AGOSTINO, RICCARDO, CRAMAROSSA, FRANCESCO, FRACASSI, FRANCESCO, CAPORICCIO, GERARDO, ILLUZZI, FRANCESCA

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FILM, STRATI, NASTRI, LASTRE E STRUTTURE SIMILI DI METALLO O MATERIE PLASTICHE RIVESTITI CON FILM SOTTILI DI POLIFLUOROCARBURI von FRANCESCO CRAMAROSSO, RICCARDO D'AGOSTINO, FRANCESCA ILLUZZI, FRANCESCO FRACASSI, GERARDO CAPORICCIO

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