A six-degree-of-freedom surface encoder for precision positioning of a planar motion stage von Li, Xinghui, Gao, Wei, Muto, Hiroshi, Shimizu, Yuki, Ito, So, Dian, Songyi

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A two-axis Lloyd's mirror interferometer for fabrication of two-dimensional diffraction gratings von Li, Xinghui, Gao, Wei, Shimizu, Yuki, Ito, So

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Preparation of undecanoic acid-terminated Si particles from rice husks von Matsumoto, Kimihisa, Kamiya, Kazuhide, Ito, So, Yasuda, Hidehiro

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Measurement of form error of a probe tip ball for coordinate measuring machine (CMM) using a rotating reference sphere von Ito, So, Tsutsumi, Daisuke, Kamiya, Kazuhide, Matsumoto, Kimihisa, Kawasegi, Noritaka

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Expansion of measurement area of hand-scraped surface using stitching method for oblique-incident interferometer von ARUGA, Masakazu, ITO, So, TSUGAWA, Fuma, MATSUMOTO, Kimihisa, KAMIYA, Kazuhide

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Auto-tracking single point diamond cutting on non-planar brittle material substrates by a high-rigidity force controlled fast tool servo von Chen, Yuan-Liu, Cai, Yindi, Tohyama, Keisuke, Shimizu, Yuki, Ito, So, Gao, Wei

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Influences of misalignment errors of optical components in an orthogonal two-axis Lloyd's mirror interferometer von Shimizu, Yuki, Aihara, Ryo, Ren, Zongwei, Chen, Yuan-Liu, Ito, So, Gao, Wei

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Design and construction of the motion mechanism of an XY micro-stage for precision positioning von Shimizu, Yuki, Peng, Yuxin, Kaneko, Junji, Azuma, Toyohiro, Ito, So, Gao, Wei, Lu, Tien-Fu

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Reduction Mechanism for CeO2 Revealed by Direct Observation of the Oxygen Vacancy Distribution in Shape‐Controlled CeO2 von Hojo, Hajime, Hirota, Kazuki, Ito, So, Einaga, Hisahiro

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An ultra-precision tool nanoindentation instrument for replication of single point diamond tool cutting edges von Cai, Yindi, Chen, Yuan-Liu, Xu, Malu, Shimizu, Yuki, Ito, So, Matsukuma, Hiraku, Gao, Wei

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An optical lever by using a mode-locked laser for angle measurement von Shimizu, Yuki, Kudo, Yukitoshi, Chen, Yuan-Liu, Ito, So, Gao, Wei

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Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe von Aruga, Masakazu, Ito, So, Kato, Daichi, Matsumoto, Kimihisa, Kamiya, Kazuhide

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An edge reversal method for precision measurement of cutting edge radius of single point diamond tools von Chen, Yuan-Liu, Cai, Yindi, Xu, Malu, Shimizu, Yuki, Ito, So, Gao, Wei

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Development of a Microprobing System for Side Wall Detection Based on Local Surface Interaction Force Detection von Ito, So, Shima, Yusuke, Kato, Daichi, Matsumoto, Kimihisa, Kamiya, Kazuhide

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Pitch deviation measurement of an involute spur gear by a rotary profiling system von Xu, Bin, Shimizu, Yuki, Ito, So, Gao, Wei

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A Cr-N thin film displacement sensor for precision positioning of a micro-stage von Peng, Yuxin, Ito, So, Shimizu, Yuki, Azuma, Toyohiro, Gao, Wei, Niwa, Eiji

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Precision tool setting for fabrication of a microstructure array von Gao, Wei, Chen, Yuan-Liu, Lee, Kang-Won, Noh, Young-Jin, Shimizu, Yuki, Ito, So

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Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting von Cai, Yindi, Chen, Yuan-Liu, Shimizu, Yuki, Ito, So, Gao, Wei, Zhang, Liangchi

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Separating photoluminescence of porous Si in porous colloidal Si and chlorophyll dispersion von Matsumoto, Kimihisa, Eda, Akira, Kamiya, Kazuhide, Ito, So

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On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact von Chen, Yuan-Liu, Cai, Yindi, Shimizu, Yuki, Ito, So, Gao, Wei, Ju, Bing-Feng

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