Etching Mechanism of Si-rich SiOx Film by Atomic Hydrogen Annealing von Heya, Akira, Ota, Kazushi, Inoue, Shozo, Haruyama, Yuichi, Kanda, Kazuhiro, Sumitomo, Koji

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Influences of Exothermic Reactive Layer and Metal Interlayer on Fracture Behavior of Reactively Bonded Solder Joints von Namazu, Takahiro, Ohtani, Kohei, Inoue, Shozo, Miyake, Shugo

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Importance of Bonding Atmosphere for Mechanical Reliability of Reactively Bonded Solder Joints von Miyake, Shugo, Ohtani, Kohei, Inoue, Shozo, Namazu, Takahiro

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Cathodoluminescence Spectroscopic Stress Analysis for Silicon Oxide Film and Its Damage Evaluation von Kammachi, Shingo, Goshima, Yoshiharu, Goami, Nobutaka, Yamashita, Naoaki, Kakinuma, Shigeru, Nishikata, Kentaro, Naka, Nobuyuki, Inoue, Shozo, Namazu, Takahiro

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Influence of 700 °C vacuum annealing on fracture behavior of micro/nanoscale focused ion beam fabricated silicon structures von Goshima, Yoshiharu, Fujii, Tatsuya, Inoue, Shozo, Namazu, Takahiro

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Comparison of mechanical characteristics of focused ion beam fabricated silicon nanowires von Ina, Ginnosuke, Fujii, Tatsuya, Kozeki, Takahiro, Miura, Eri, Inoue, Shozo, Namazu, Takahiro

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Focused Ion Beam Induced Surface Damage Effect on the Mechanical Properties of Silicon Nanowires von Fujii, Tatsuya, Namazu, Takahiro, Sudoh, Koichi, Sakakihara, Shouichi, Inoue, Shozo

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Thermal Annealing Effect on Elastic-Plastic Behavior of Al-Si-Cu Structural Films Under Uniaxial and Biaxial Tension von Namazu, Takahiro, Fujii, Masayuki, Fujii, Hiroki, Masunishi, Kei, Tomizawa, Yasushi, Inoue, Shozo

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Influences of film composition and annealing on the mechanical and electrical properties of W–Mo thin films von Namazu, Takahiro, Maruo, Naoto, Inoue, Shozo

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Influence of gallium ion beam acceleration voltage on the bend angle of amorphous silicon cantilevers von Kozeki, Takahiro, Phan, Hoang-Phuong, Dao, Dzung Viet, Inoue, Shozo, Namazu, Takahiro

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Influences of pretreatment and hard baking on the mechanical reliability of SU-8 microstructures von Morikaku, Toshiyuki, Kaibara, Yoshinori, Inoue, Masatoshi, Miura, Takuya, Suzuki, Takaaki, Oohira, Fumikazu, Inoue, Shozo, Namazu, Takahiro

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Thermomechanical tensile characterization of Ti–Ni shape memory alloy films for design of MEMS actuator von Namazu, Takahiro, Hashizume, Akinobu, Inoue, Shozo

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Self-propagating explosive Al/Ni flakes fabricated by dual-source sputtering to mesh substrate von Matsuda, Takanori, Inoue, Shozo, Namazu, Takahiro

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Nano-Scale Tensile Testing and Sample Preparation Techniques for Silicon Nanowires von Fujii, Tatsuya, Sudoh, Koichi, Sakakihara, Shouichi, Naito, Muneyuki, Inoue, Shozo, Namazu, Takahiro

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Quasistatic and dynamic mechanical properties of Al–Si–Cu structural films in uniaxial tension von Fujii, Masayuki, Namazu, Takahiro, Fujii, Hiroki, Masunishi, Kei, Tomizawa, Yasushi, Inoue, Shozo

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Tension–Torsion Combined Loading Test Equipment for a Minute Beam Specimen von Namazu, Takahiro, Yamagiwa, Hiroya, Inoue, Shozo

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Crack-Less Wafer-Level Packaging Using Flash Heating Technique for Micro Devices von Inoue, Shozo, Yoshiki, Keisuke, Namazu, Takahiro, Ohtani, Kohei

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Design and Development of a Biaxial Tensile Test Device for a Thin Film Specimen von Namazu, Takahiro, Nagai, Yuji, Naka, Nobuyuki, Araki, Nozomu, Inoue, Shozo

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Effect of Cu content on the shape memory behavior of Ti–Ni–Cu alloy thin films prepared by triple-source dc magnetron sputtering von Hori, Kosuke, Namazu, Takahiro, Inoue, Shozo

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Al/Ni Self-Propagating Exothermic Film for MEMS Application von Inoue, Shozo, Namazu, Takahiro

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