Characterization and integration of new porous low- k dielectric ( k < 2.3) for 65 nm technology and beyond von Choi, Kyeong-Keun, Cho, Ihl Hyun, Park, Sang Jong, Lim, Jung Eun, Jung, Oh Jin, Park, Jong Hyuk, Min, Byung Seung, Hwang, Sung Bo, Ko, Min Jin, Lee, Jeong Gun

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INCREASED THERMAL STABILITY OF W/Ta2O5 GATE STRUCTURE USING EFFECTIVE DIFFUSION BARRIER OF DENUDED TUNGSTEN NITRIDE von Cho, I H, Park, J-S, Sohn, D K, Ha, J H

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Investigation of Pt/γ-Al2O3 catalysts prepared by sol-gel method : XAFS and ethane hydrogenolysis von IHL HYUN CHO, SEUNG BIN PARK, SUNG JUNE CHO, RYONG RYOO

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Novel test structures for on-chip characterization of coupling capacitance variation by in- and anti-phase crosstalk in multi-level metallization von Hi-Deok Lee, Hee-Hwan Ji, In-Sik Han, Han-Soo Joo, Dae-Mann Kim, Sung-Hyung Park, Heui-Seung Lee, Won-Joon Ho, Dae-Byung Kim, Ihl-Hyun Cho, Sang-Young Kim, Sung-Bo Hwang, Jeong-Gon Lee, Jin-Won Park

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Effect of Wet Etched Thickness and Reoxidation on Reliability of Dual Gate Oxide for Sub-Quarter Micron Complementary Metal-Oxide-Semiconductor Devices von Cho, Ihl Hyun, Sung, Nag Kyunn, Oh, Jong Hyuk, Park, Min Soo, Sohn, Dong Kyun, Park, Jin Won

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Abnormal growth of LPCVD SiO2 on CoSi2 by high dose As implantation von IHL HYUN CHO, NAK KYUN SUNG, HYUN SUK SHIM, RYU, Hyuk-Hyun, JAE HEE HA, WON GYU LEE

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Abnormal silicon oxide growth on cobalt silicide in arsenic-doped N+ active areas von Lee, Won Gyu, Sung, Nak Kyun, Cho, Ihl Hyun, Ryu, Hyuk Hyun

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Dependency of 1/f Noise on Initial Oxidation Method in Nano-CMOS Technology von Kang, Young Seok, Lee, Hi Deok, Lee, Chang Young, Kim, Sang Young, Han, In Shik, Lee, Jeong Gun, Cho, Ihl Hyun, Hwang, Sung Bo, Park, Seong Hyung, Lee, Hee Seung, Ji, Hee Hwan, Kim, Dae Byung, Kim, Kyung Min

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Ru Clusters with Controlled Sizes in NaY Zeolite: Catalytic Activity for Ethane Hydrogenolysis and XANES von Cho, I.H., Cho, S.J., Park, S.B., Ryoo, R.

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Humidity sensor with void within interconnect and method of manufacturing the same von Cho Ihl Hyun, Hebert Francois

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Abnormal growth of LPCVD SiO 2 on CoSi 2 by high dose As implantation von Cho, Ihl Hyun, Sung, Nak Kyun, Shim, Hyun Suk, Ryu, Hyuk-Hyun, Ha, Jae Hee, Lee, Won Gyu

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HUMIDITY SENSOR WITH VOID WITHIN INTERCONNECT AND METHOD OF MANUFACTURING THE SAME von CHO IHL HYUN, HEBERT FRANCOIS

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Thermal Immune NiSi Technology for Nano-scale CMOSFETs von Hi-Deok Lee, Soon-Young Oh, Yong-Jin Kim, Won-Jae Lee, In-Shik Han, Ihl-Hyun Cho, Sung-Bo Hwang, Jong-Gun Lee

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Effects of Capping Layers on Surface Oxidation of CoSi2 von Won Gyu Lee, Daechul Cho, Ihl Hyun Cho

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Increased Thermal Stability of W/Ta 2 O 5 Gate Structure Using Effective Diffusion Barrier of Denuded Tungsten Nitride von Cho, Ihl Hyun, Park, Ji-Soo, Sohn, Dong Kyun, Ha, Jae Hee

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Investigation of Pt/γ-Al2O3Catalysts Prepared by Sol–Gel Method: XAFS and Ethane Hydrogenolysis von Cho, Ihl Hyun, Park, Seung Bin, Cho, Sung June, Ryoo, Ryong

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Investigation of Pt/γ-Al2O3Catalysts Prepared by Sol–Gel Method von Cho, Ihl Hyun, Park, Seung Bin, Cho, Sung June, Ryoo, Ryong

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Gate oxide thinning effects at the edge of shallow trench isolation in the dual gate oxide process von Seok-Woo Lee, Ihl Hyun Cho, Sang Hyuk Park, Hong Goo Choi, Nam Gawk Kim, Jong-Kwan Kim, Sang Beom Han, KyungHo Lee

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Characterization of MoAl2O3 sol-gel catalyst by 27Al nuclear magnetic resonance spectroscopy von Cho, Ihl Hyun, Park, Seung Bin, Kwak, Ja Hun

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Characterization of [formula omitted] sol-gel catalyst by 27Al nuclear magnetic resonance spectroscopy von Cho, Ihl Hyun, Park, Seung Bin, Kwak, Ja Hun

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