Hot-wire chemical vapor deposition of WO3−x thin films of various oxygen contents von Houweling, Z. Silvester, Geus, John W., Schropp, Ruud E.I.

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Synthesis of WO3 Nanogranular Thin Films by Hot-Wire CVD von Houweling, Z. Silvester, Geus, John W., Schropp, Ruud E. I.

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Fracture Toughness of Free-Standing ZrSi x Thin Films Measured Using Crack-on-a-Chip Method von Shafikov, Airat, van de Kruijs, Robbert, Benschop, Jos, van den Beld, Wesley, Houweling, Silvester, Bijkerk, Fred

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Fracture Toughness of Free-Standing ZrSix Thin Films Measured Using Crack-on-a-Chip Method von Shafikov, Airat, van de Kruijs, Robbert, Benschop, Jos, van den Beld, Wesley, Houweling, Silvester, Bijkerk, Fred

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Silicon Nitride as Dielectric Medium Deposited at Ultra High Deposition Rate (>7 nm/s) using Hot-Wire Chemical Vapor Deposition von Verlaan, Vasco, Houweling, Silvester, Werf, Karine van der, Goldbach, Hanno D., Schropp, Ruud E. I.

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Hydrogen etch resistance of aluminium oxide passivated graphitic layers von Kizir, Seda, van den Beld, Wesley T E, Verbakel, Jort D, Pushkarev, Roman, Houweling, Z Silvester, van de Kruijs, Robbert W E, Benschop, Jos P H, Bijkerk, Fred

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Nanorod solar cell with an ultrathin a-Si:H absorber layer von Kuang, Yinghuan, van der Werf, Karine H. M., Houweling, Z. Silvester, Schropp, Ruud E. I.

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PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS AND METHOD von PAUL ALEXANDER VERMEULEN, ZOMER SILVESTER HOUWELING

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PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS AND METHOD von PAUL ALEXANDER VERMEULEN, ZOMER SILVESTER HOUWELING

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PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS, AND USE OF A MEMBRANE von PAUL ALEXANDER VERMEULEN, ZOMER SILVESTER HOUWELING

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Growth process conditions of tungsten oxide thin films using hot-wire chemical vapor deposition von Houweling, Z. Silvester, Geus, John W., de Jong, Michiel, Harks, Peter-Paul R.M.L., van der Werf, Karine H.M., Schropp, Ruud E.I.

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Fabrication and characterization of nanorod solar cells with an ultrathin a-Si:H absorber layer von Kuang, Yinghuan, van der Werf, Karine H.M., Houweling, Z. Silvester, Di Vece, Marcel, Schropp, Ruud E.I.

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PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS AND METHOD von PAUL ALEXANDER VERMEULEN, ZOMER SILVESTER HOUWELING

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Self-assembled isolated monodisperse NiO1+γ nanoparticles as catalytic templates for nanomaterials synthesis von Houweling, Z. Silvester, Geus, John W., Harks, Peter-Paul R.M.L., Heller, René, Schropp, Ruud E.I.

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CLEANING APPARATUS AND METHOD von ZOMER SILVESTER HOUWELING, MARCUS ADRIANUS VAN DE KERKHOF, ALEXANDR DOLGOV, ANDREY NIKIPELOV

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Synthesis of WO 3 Nanogranular Thin Films by Hot‐Wire CVD von Houweling, Z. Silvester, Geus, John W., Schropp, Ruud E. I.

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PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS von PAUL ALEXANDER VERMEULEN, ZOMER SILVESTER HOUWELING, VOLKER DIRK HILDENBRAND, ALEXANDER LUDWIG KLEIN

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PELLICLE MEMBRANE FOR A LITHOGRAPHIC APPARATUS von JOHAN HENDRIK KLOOTWIJK, ZOMER SILVESTER HOUWELING, INCI DONMEZ NOYAN, TIES WOUTER VAN DER WOORD, ADRIANUS JOHANNES MARIA GIESBERS, VOLKER DIRK HILDENBRAND, ALEXANDER LUDWIG KLEIN

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CLEANING APPARATUS AND METHOD von ZOMER SILVESTER HOUWELING, MARCUS ADRIANUS VAN DE KERKHOF, ALEXANDR DOLGOV, ANDREY NIKIPELOV

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Metallic Tungsten Nanostructures and Highly Nanostructured Thin Films by Deposition of Tungsten Oxide and Subsequent Reduction in a Single Hot-Wire CVD Process von Harks, Peter-Paul R. M. L., Houweling, Z. Silvester, de Jong, Michiel, Kuang, Yinghuan, Geus, John W., Schropp, Ruud E. I.

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