One-Step Etching Characteristics of ITO/Ag/ITO Multilayered Electrode in High-Density and High-Electron-Temperature Plasma von Yoon, Ho-Won, Shin, Seung-Min, Kwon, Seong-Yong, Cho, Hyun-Min, Kim, Sang-Gab, Hong, Mun-Pyo

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Effect of nitric acid on wet etching behavior of Cu/Mo for TFT application von Seo, Bo-Hyun, Lee, Sang-Hyuk, Park, In-Sun, Seo, Jong Hyun, Choe, HeeHwan, Jeon, Jae-Hong, Hong, Mun-pyo

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64‐4: ECR Plasma Source for Copper Thin Film Dry Etching von Jang, Jin Nyoung, Lee, Jong Hwa, Lee, Sangheon, Jung, Kiro, Kim, Donghoon, Hong, Mun-Pyo, Kim, Sang-Gab, Jang, Soo Ouk, Kim, Chiwoo

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55‐3: Development of Low‐Temperature Metal Dry‐Etching Equipment via ECR Plasma Source von Kim, Chiwoo, Jung, Jae Hoon, Jang, Jin Nyoung, Lee, Jong Hwa, Jung, Kiro, Yoon, Ho-Won, Lee, Sangheon, Kim, Donghoon, Hong, Mun-Pyo, Kim, Sang-Gab, Jang, Soo Ouk

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Study on wet patterning of thin films in vertical-transfer wet station for thin-film-transistor manufacturing von Lee, Sang-Hyuk, Park, In-Sun, Choe, Hee Hwan, Hong, Mun-Pyo, Seo, Jong Hyun, Kim, Pal-gon

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14.8% perovskite solar cells employing carbazole derivatives as hole transporting materials von Sung, Sang Do, Kang, Min Soo, Choi, In Taek, Kim, Hong Mo, Kim, Hyoungjin, Hong, MunPyo, Kim, Hwan Kyu, Lee, Wan In

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Stoichiometric silicon nitride thin films for gas barrier, with applications to flexible and stretchable OLED encapsulation von Shin, SeungMin, Yoon, Ho Won, Jang, YunSung, Hong, MunPyo

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Effects of Plasma Process Induced Damages on Organic Gate Dielectrics of Organic Thin-Film Transistors von Kim, Doo-Hyun, Kim, Dong-Woo, Kim, Keon-Soo, Kim, Hyoung-Jin, Moon, Ji-Sun, Hong, Mun-Pyo, Kim, Bo-Sung, Shin, Jung-Han, Kim, Young-Min, Song, Keun-Kyu, Shin, Seong-Sik

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Etching characteristics and mechanism of indium tin oxide films in an inductively coupled HBr∕Ar plasma von Kwon, Kwang-Ho, Efremov, Alexander, Ham, Yong-Hyun, Min, Nam Ki, Lee, Hyun Woo, Hong, Mun Pyo, Kim, Kwangsoo

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51‐3: Copper Thin Film Dry Etching Equipment via ECR Plasma Source von Jang, Jin Nyoung, Lee, Jong Hwa, Jung, Jae Hoon, Jung, Kiro, Lee, Sangheon, Kim, Donghoon, Hong, Mun‐Pyo, Kim, Sang‐Gab, Jang, Soo Ouk, Kim, Chiwoo

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The Effect of Passivation Layers on the Negative Bias Instability of Ga–In–Zn–O Thin Film Transistors under Illumination von Jung, Ji Sim, Lee, Kwang-Hee, Son, Kyoung Seok, Park, Joon Seok, Kim, Tae Sang, Seo, Jong Hyun, Jeon, Jae-Hong, Hong, Mun-Pyo, Kwon, Jang-Yeon, Koo, Bonwon, Lee, Sangyun

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Analysis of deformation of thin polyimide film by pre-strained silicone elastomer von Ahmed, Falguni, Shin, SeungMin, Song, Joonho, Kim, Jung Yup, Park, Ah-Young, Hong, MunPyo

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X-ray Scattering Studies of Phase-Separated Composite Organic Film Cells von Choi, Hong, Kim, Dong-Woo, Rhie, Kung-Won, Hong, Mun-Pyo, Shin, Sung-Tae, Kumar, Satyendra, Jang, Won-gun, Lee, Baek-woon, Kim, Kyeong-hyeon

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Microscopic-Stress-Induced retardation between amorphous silicon nitride and amorphous indium zinc oxide having different stresses von Choi, Nakcho, Yim, Taekyung, Yoon, Yeogeon, Cheong, Byoungho, Hong, MunPyo

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Effect of boron and silicon doping on the surface and electrical properties of diamond like carbon films by magnetron sputtering technique von PARK, Chang-Sun, SUN GYU CHOI, JANG, Jin-Nyoung, MUNPYO HONG, KWON, Kwang-Ho, PARK, Hyung-Ho

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Effects of bombardment of negative oxygen ions on amorphous indium gallium zinc oxide thin films by superimposed rf/dc magnetron sputtering von Kim, DooHyun, Jang, JinNyoung, Yoon, SooBok, Hong, MunPyo

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Development of inverted OLED with top ITO anode by plasma damage-free sputtering von Lee, YouJong, Kim, JooHyung, Jang, Jin N., Yang, Ie Hong, Kwon, SoonNam, Hong, MunPyo, Kim, Dae C., Oh, Koung S., Yoo, Suk Jae, Lee, Bon J., Jang, Won-Gun

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Interface studies of Aluminum, 8-hydroxyquinolatolithium (Liq) and Alq3 for inverted OLED application von Lee, Youjong, Kim, Joohyung, Kwon, Soonnam, Min, Chang-Ki, Yi, Y., Kim, J.W., Koo, Bonki, Hong, MunPyo

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The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process von Lee, Taehoon, Min, Nam-Ki, Lee, Hyun Woo, Jang, JinNyoung, Lee, DongHyuck, Hong, MunPyo, Kwon, Kwang-Ho

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(Invited) Beyond the Current Horizontal of Silicon Thin Film Technology : Light-Soaking Free Nano-Crystal Embedded Polymorphous Silicon Thin Film by Neutral Beam Assisted CVD at Ro... von Hong, MunPyo, Jang, Jin Nyoung

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