Experimental surface acoustic wave properties of AlN thin films on sapphire substrates von KAYA, K, TAKAHASHI, H, SHIBATA, Y, KANNO, Y, HIRAI, T

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Synthesis and Surface Acoustic Wave Properties of AlN Thin Films Fabricated on (001) and (110) Sapphire Substrates Using Chemical Vapor Deposition of AlCl 3 –NH 3 System von Kaya, Kiyoshi, Takahashi, Hiroshi, Shibata, Yoshihiko, Hirai, Yasuhito Kanno

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Synthesis of AlN thin films on sapphire substrates by chemical vapor deposition of AlCl3-NH3 system and surface acoustic wave properties von KAYA, K, KANNO, Y, TAKAHASHI, H, SHIBATA, Y, HIRAI, T

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Synthesis and surface acoustic wave properties of AlN thin films fabricated on (001) and (110) sapphire substrates using chemical vapor deposition of AlCl3-NH3 system von KAYA, K, TAKABASHI, H, SHIBATA, Y, KANNO, Y, HIRAI, T

Volltext

Synthesis of AlN Thin Films on Sapphire Substrates by Chemical Vapor Deposition of AlCl 3 –NH 3 System and Surface Acoustic Wave Properties von Kaya, Kiyoshi, Kanno, Yasuhito, Takahashi, Hiroshi, Hirai, Yoshihiko Shibata

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