Fast and Reliable Measurement of Thin Film Thickness Profile Based on Wavelet Transform in Spectrally Resolved White-Light Interferometry von Kim, Min-Gab, Pahk, Heui-Jae

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Simulation of thin film thickness distribution for thermal evaporation process using a scanning linear source von Kim, Min‐Gab, Pahk, Heui‐Jae

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Active Contour Method Based Sub-pixel Critical Dimension Measurement of Thin Film Transistor Liquid Crystal Display (TFT-LCD) Patterns von Lee, Jeong Hoon, Kim, Tai-Wook, Ku, Dong Hun, Pahk, Heui Jae

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Modeling of the angular distribution of the emitted molecular flux from a cylindrical nozzle in a free molecular flow von Kim, Do‐hun, Lee, Myung‐sun, Moon, Jeong‐il, Pahk, Heui‐jae

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Enhancing Battery Exterior Defect Inspection Accuracy Through Defect-Background Separated GAN Development von Ku, Donghun, Pahk, Heui Jae

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Single-shot multispectral angle-resolved ellipsometry von Choi, Garam, Woo Lee, Seung, Yong Lee, Sin, Jae Pahk, Heui

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Accurate Roughness Measurement Using a Method for Evaluation and Interpolation of the Validity of Height Data from a Scanning White-light Interferometer von Namyoon Kim, Seung Woo Lee, Yongjun I, Heui-Jae Pahk

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Thin-film thickness profile measurement using wavelet transform in wavelength-scanning interferometry von Hwang, Young-Min, Yoon, Sung-Won, Kim, Jung-Hwan, Kim, Souk, Pahk, Heui-Jae

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Development of the precision planar motor stage using a new magnet array and robust control with the parametric uncertainty model von Shin, Hyun-Jang, Pahk, Heui-Jae

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Precise Edge Detection Method Using Sigmoid Function in Blurry and Noisy Image for TFT-LCD 2D Critical Dimension Measurement von Lee, Seung Woo, Lee, Sin Yong, Pahk, Heui Jae

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A Method for Improving Resolution and Critical Dimension Measurement of an Organic Layer Using Deep Learning Superresolution von Kim, Sangyun, Pahk, Heui Jae

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Thickness Measurement of a Transparent Thin Film Using Phase Change in White-Light Phase-Shift Interferometry von Kim, Jaeho, Kim, Kwangrak, Pahk, Heui Jae

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Fast Analysis of Film Thickness in Spectroscopic Reflectometry using Direct Phase Extraction von Kim, Kwangrak, Kwon, Soonyang, Pahk, Heui Jae

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Generating a True Color Image with Data from Scanning White-Light Interferometry by Using a Fourier Transform von Kim, Jin-Yong, Kim, Seungjae, Kim, Min-Gyu, Pahk, Heui Jae

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A new technique for volumetric error assessment of CNC machine tools incorporating ball bar measurement and 3D volumetric error model von Jae Pahk, Heui, Sam Kim, Young, Hee Moon, Joon

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Improvement of PS Measurement by Phase Compensation Method and Profile Fitting Method in White Light Phase Shifting Interferometry : Retraction von Ku, Dong Hun, Lee, Sun Mi, Roh, Ha Na, Kim, Tai-Wook, Pahk, Heui Jae

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Real-time critical dimension measurement of thin film transistor liquid crystal display patterns using optical coherence tomography von Park, Sung-Hoon, Kim, Tai-Wook, Lee, Jeong-Ho, Pahk, Heui-Jae

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Ultra-short laser patterning of thin-film CIGS solar cells through glass substrate von Kim, Tai-Wook, Lee, Jeong-Yun, Kim, Do-Hun, Pahk, Heui-Jae

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Improvement of PS Measurement by Phase Compensation Method and Profile Fitting Method in White Light Phase Shifting Interferometry von Dong Hun Ku, Sun Mi Lee, Ha Na Roh, Tai-Wook Kim, Heui Jae Pahk

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Angle-resolved spectral reflectometry with a digital light processing projector von Choi, Garam, Kim, Mingyu, Kim, Jinyong, Pahk, Heui Jae

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