Charge-induced pattern displacement in E-beam lithography von Arat, Kerim T., Klimpel, Thomas, Zonnevylle, Aernout C., Ketelaars, Wilhelmus S. M. M., Heerkens, Carel Th. H., Hagen, Cornelis W.

Volltext

Boron-layer silicon photodiodes for high-efficiency low-energy electron detection von Šakić, Agata, Nanver, Lis K., Scholtes, Tom L.M., Heerkens, Carel Th.H., Knežević, Tihomir, Veen, Gerard van, Kooijman, Kees, Vogelsang, Patrick

Volltext

Silicon photodiodes for high-efficiency low-energy electron detection von Šakić, Agata, Nanver, Lis K, Scholtes, T L M, Heerkens, Carel Th H, van Veen, Gerard, Kooijman, Kees, Vogelsang, Patrick

Volltext