PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS von Subramonium, Pramod, van Schravendijk, Bart J, Sriram, Mandyam A, Petraglia, Jennifer L, Niu, Dong, Antonelli, George Andrew, Breiling, Patrick G, Alexy, John B, Womack, Joseph L, Haverkamp, Jason Dirk, Fox, Keith

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ENHANCING ADHESION OF CAP LAYER FILMS von HAUSMANN DENNIS, SHAVIV ROEY, HAVERKAMP JASON DIRK

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Multi-station sequential curing of dielectric films von Shrinivasan Krishnan, Smargiassi Eugene, Sabri Mohamed, Haverkamp Jason Dirk, McLaughlin Kevin M, Hausmann Dennis M, Rivkin Michael

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PECVD APPARATUS FOR IN-SITU DEPOSITION OF FILM STACKS von Petraglia, Jennifer Leigh, Subramonium, Pramod, van Schravendijk, Bart J, Sriram, Mandyam Ammanjee, Niu, Dong, Antonelli, George Andrew, Breiling, Patrick G, Alexy, John B, Womack, Joseph L, Haverkamp, Jason Dirk, Fox, Keith

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PECVD apparatus for in-situ deposition of film stacks von Subramonium, Pramod, van Schravendijk, Bart J, Sriram, Mandyam A, Petraglia, Jennifer L, Niu, Dong, Antonelli, George Andrew, Breiling, Patrick G, Alexy, John B, Womack, Joseph L, Haverkamp, Jason Dirk, Fox, Keith

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MULTI-STATION SEQUENTIAL CURING OF DIELECTRIC FILMS von HAVERKAMP JASON DIRK, HAUSMANN DENNIS M, SHRINIVASAN KRISHNAN, MCLAUGHLIN KEVIN M, SMARGIASSI EUGENE, SABRI MOHAMED, RIVKIN MICHAEL

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IN-SITU DEPOSITION OF FILM STACKS von WOMACK JOSEPH L, FOX KEITH, SUBRAMONIUM PRAMOD, ALEXY JOHN B, HAVERKAMP JASON DIRK, PETRAGLIA JENNIFER L, NIU DONG, SRIRAM MANDYAM A, BREILING PATRICK G, ANTONELLI GEORGE ANDREW, VAN SCHRAVENDIJK BART J

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