Improved emission uniformity from a liquid-jet laser-plasma extreme-ultraviolet source von Hansson, Björn A M, Mosesson, Sofia, Hertz, Hans M

Volltext

Liquid-jet laser–plasma extreme ultraviolet sources: from droplets to filaments von Hansson, Björn A M, Hertz, Hans M

Volltext

MetalJet source for time-resolved X-ray diffraction and scattering von Adibhatla, Anasuya, Espes, Emil, Hållstedt, Julius, Lundström, Ulf, Hansson, Björn A. M., Hemberg, Oscar, Otendal, Mikael, Tuohimaa, Tomi, Takman, Per

Volltext

Current status of the liquid-metal-jet X-ray source technology and SAXS applications von Espes, Emil, Hansson, Björn A. M., Hemberg, Oscar, Otendal, Mikael, Johansson, Göran, Takman, Per, Tuohimaa, Tomi

Volltext

Characterization of a liquid-xenon-jet laser-plasma extreme-ultraviolet source von Hansson, B. A. M., Hemberg, O., Hertz, H. M., Berglund, M., Choi, H.-J., Jacobsson, B., Janin, E., Mosesson, S., Rymell, L., Thoresen, J., Wilner, M.

Volltext

Liquid-jet laser-plasma extreme ultraviolet sources: from droplets to filaments : Special cluster on extreme ultraviolet light sources for semiconductor manufacturing von HANSSON, Björn A. M, HERTZ, Hans M

Volltext

High-brightness liquid-metal-jet X-ray tube von Hemberg, O., Hansson, B. A. M., Otendal, M., Tuohimaa, T., Hertz, H. M.

Volltext

Simulation of interference patterns in solid-state biprism devices von Hansson, Björn A.M., Machida, Nobuya, Furuya, Kazuhito, Wernersson, Lars-Erik, Samuelson, Lars

Volltext

Laser-Plasma Sources for Extreme-Ultraviolet Lithography von Hansson, Björn

Volltext bestellen

Laser produced plasma EUV light source von Bykanov Alexander N, Hansson Bjorn A. M, Brandt David C, Fomenkov Igor V

Volltext bestellen

LASER PRODUCED PLASMA EUV LIGHT SOURCE von BRANDT, DAVID, C, HANSSON, BJORN, A. M, BYKANOV, ALEXANDER, N, FOMENKOV, IGOR, V

Volltext bestellen

Systems for protecting internal components of a EUV light source from plasma-generated debris von HANSSON BJORN A. M, BOWERING NORBERT

Volltext bestellen

Systems for protecting internal components of a EUV light source from plasma-generated debris von Bowering, Norbert, Hansson, Bjorn A. M

Volltext bestellen

LASER PRODUCED PLASMA EUV LIGHT SOURCE von FOMENKOV IGOR V, HANSSON BJORN A. M, BYKANOV ALEXANDER N, BRANDT DAVID C

Volltext bestellen

SYSTEMS AND METHODS FOR REDUCING THE INFLUENCE OF PLASMA-GENERATED DEBRIS ON THE INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE von ERSHOV, ALEXANDER, I, HANSSON, BJORN, A., M, FOMENKOV, IGOR, V, MARX, WILLIAM, F, PARTLO, WILLIAM, N, BOWERING, NORBERT R, KHODYKIN, OLEH

Volltext bestellen

EUV light source von BOWERING NORBERT R, SIMMONS RODNEY D, HANSSON BJORN A. M

Volltext bestellen

EUV light source von Bowering, Norbert R, Hansson, Bjorn A. M, Simmons, Rodney D

Volltext bestellen

Laser produced plasma EUV light source von FOMENKOV IGOR V, HANSSON BJORN A. M, BYKANOV ALEXANDER N, BRANDT DAVID C

Volltext bestellen

LASER PRODUCED PLASMA EUV LIGHT SOURCE von BRANDT, DAVID, C, HANSSON, BJORN, A. M, BYKANOV, ALEXANDER, N, FOMENKOV, IGOR, V

Volltext bestellen

SYSTEMS FOR PROTECTING INTERNAL COMPONENTS OF AN EUV LIGHT SOURCE FROM PLASMA-GENERATED DEBRIS von ERSHOV, ALEXANDER, I, BOWERING, NORBERT, R, HANSSON, BJORN, A., M, BYKANOV, ALEXANDER, N, PARTLO, WILLIAM, N, KHODYKIN, OLEH

Volltext bestellen