Study of plasma charging-induced white pixel defect increase in CMOS active pixel sensor von Tokashiki, Ken, Bai, KeunHee, Baek, KyeHyun, Kim, Yongjin, Min, Gyungjin, Kang, Changjin, Cho, Hanku, Moon, Jootae

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Angular Dependence of the Etch Rates of TaN in CF[sub 4]/Ar and CHF[sub 3]/Ar Plasmas von Jang, Il-Yong, Lee, Jin-Kwan, Lee, Seung-Hang, Huh, Sung-Min, Kwon, Hyuk Joo, Kim, Seong-Sue, Cho, HanKu, Moon, Sang Heup

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Determination of the CD Performance and Carbon Contamination of an EUV Mask by Using a Coherent Scattering Microscopy/In-situ Contamination System von Ahn, Jinho, Doh, Jonggul, Jeong, Changyoung, Lee, Sangsul, Lee, Jaeuk, Cha, Hansun, Lee, Donggun, Kim, Seongsue, Cho, Hanku, Rah, Seungyu

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Derivation of line edge roughness based on analytic model of stochastic exposure distribution von Guo, Rui, Lee, Soo-Young, Choi, Jin, Lee, Sang-Hee, Shin, In-Kyun, Jeon, Chan-Uk, Kim, Byung-Gook, Cho, Hanku

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Real-time monitoring of plasma flickering in high pressure electronegative discharge von Yongjin Kim, Kyehyun Baek, Samhae Lee, Sungno Lee, Jaewook Lee, Yeonhong Jee, Changjin Kang, Hanku Cho, Jootae Moon

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Real-time process monitoring by optical emission spectroscopy in DRAM gate CD control von Yongjin Kim, Gyungjin Min, Changjin Kang, Hanku Cho, Jootae Moon

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Optimization of Sample Plan for Overlay and Alignment Accuracy Improvement von Hong, Jinseog, Lee, Junghyeon, Park, Joonsoo, Cho, Hanku, Moon, Jootae

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Pattern Displacement Error under Off Axis Illumination von Seong, Nakgeuon, Kang, Hoyoung, Kye, Jongwook, Cho, Hanku, Moon, Jootae

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Impact of stray light depending on image quality: An approximation using total integrated scatter von Kim, Young-Chang, De Bisschop, Peter, Vandenberghe, Geert, Van Den Hove, Luc, Cho, Hanku, Moon, Jootae

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Binary mask side lobe suppression using space scattering bar von Suh, Sungsoo, Lee, Sukjoo, Back, Kyoung-yoon, Lee, Sungwoo, Kim, Youngchang, Kim, Sangwook, Cho, Hanku

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Low Si Recess on Cleaning Process by Dilute HF/SC-1 with Megasonic von Moon, Joo Tae, Hong, Chang Ki, Mun, Chang Sup, Cho, Han Ku, Lee, Kuntack, Cha, Ji Hoon, Kang, Dae Hyuk, Shim, Woo Gwan

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Development of a New TaN Etchant for Metal Gate von Park, Im Soo, Moon, Joo Tae, Hong, Chang Ki, Kim, Sang Yong, Cho, Han Ku, Lee, Kuntack, Cha, Ji Hoon, Lee, Mong Sup, Han, Jeong Nam

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Optimization of sampling method for overlay and alignment accuracy improvement von Jinseog Hong, Junghyeon Lee, Joonsoo Park, Hanku Cho, Jootae Moon

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Feasibility of new ARC using PECVD for both KrF and ArF lithography von Yongbeom Kim, Junghyeon Lee, Hanku Cho, Jootae Moon

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Impact of stray light depending on image quality: An approximationusing total integrated scatter von Kim, Young-Chang, De Bisschop, Peter, Vandenberghe, Geert, Van Den Hove, Luc, Cho, Hanku, Moon, Jootae

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Development of High Selective Poly-Si Strip Process by USing Remote Plasma von Han, Jeongnam, Shim, W., Choi, Sangjun, Hong, Chang-Ki, Cho, Hanku, Moon, Jootae

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CloudDMSS: robust Hadoop-based multimedia streaming service architecture for a cloud computing environment von Kim, Myoungjin, Han, Seungho, Cui, Yun, Lee, Hanku, Cho, Hogyeon, Hwang, Sungdae

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CloudDMSS: robust Hadoop-based multimedia streaming service architecture for a cloud computing environment : Advanced Grid and Pervasive Computing and its Applications von MYOUNGJIN KIM, SEUNGHO HAN, YUN CUI, HANKU LEE, HOGYEON CHO, SUNGDAE HWANG

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A TMO-Based Tele-operation Model: Supporting Real-Time Applications in Grid Environments von Kim, Chulgoon, Jeong, Karpjoo, Lee, Hanku, Kim, MoonHae, Cho, KumWon, Jeon, Segil, Ahn, Jaehoon, Ju, Hyunho

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A Grid-Based Flavonoid Informatics Portal von Xu, HaiGuo, Jeong, Karpjoo, Jung, Seunho, Lee, Hanku, Jeon, Segil, Cho, KumWon, Kim, Hyunmyung

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