Evaluation of microbial fuel cells for electricity generation from oil-contaminated wastewater von Hamamoto, Kazuhiro, Miyahara, Morio, Kouzuma, Atsushi, Matsumoto, Akiteru, Yoda, Minoru, Ishiguro, Takashi, Watanabe, Kazuya

Volltext

Aerial Image Mask Inspection System for Extreme Ultraviolet Lithography von Kinoshita, Hiroo, Hamamoto, Kazuhiro, Sakaya, Nobuyuki, Hosoya, Morio, Watanabe, Takeo

Volltext

Phase Defect Observation Using Extreme Ultraviolet Microscope von Hamamoto, Kazuhiro, Tanaka, Yuzuru, Yoshizumi, Takahiro, Hosokawa, Nobuyuki, Sakaya, Noriyuki, Hosoya, Morio, Shoki, Tsutomu, Watanabe, Takeo, Kinoshita, Hiroo

Volltext

Actinic Mask Inspection Using an EUV Microscope –Preparation of a Mirau Interferometer for Phase-Defect Detection von Hamamoto, Kazuhiro, Tanaka, Yuzuru, Kawashima, Hirotake, Lee, Seung Yoon, Hosokawa, Nobuyuki, Sakaya, Noriyuki, Hosoya, Morio, Shoki, Tsutomu, Watanabe, Takeo, Kinoshita, Hiroo

Volltext

Resist Outgassing Characteristics in Extreme Ultraviolet Lithography von Watanabe, Takeo, Hamamoto, Kazuhiro, Kinoshita, Hiroo, Hada, Hideo, Komano, Hiroshi

Volltext

Reducing off Hydrocarbon Contaminants for EUVL von Tanaka, Yuzuru, Hamamoto, Kazuhiro, Tsubakino, Harushige, Watanabe, Takeo, Kinoshita, Hiroo

Volltext

Characteristics of CA Resist in EUV Lithography von Hamamoto, Kazuhiro, Watanabe, Takeo, Hada, Hideo, Komano, Hiroshi, Kinoshita, Hiroo

Volltext

Development of Fast-Photospeed Chemically Amplified Resist in Extreme Ultraviolet Lithography von Watanabe, Takeo, Hada, Hideo, Lee, Seung Yoon, Kinoshita, Hiroo, Hamamoto, Kazuhiro, Komano, Hiroshi

Volltext

Usefulness of a mirror-image 3D mandibular bone model for reconstruction after mandibulectomy: A case report von Matsumoto, Kazuhiro, Hamamoto, Takao, Taruya, Takayuki, Ueda, Tsutomu, Takeno, Sachio

Volltext

Fine Pattern Replication Using ETS-1 Three-Aspherical Mirror Imaging System von Watanabe, Takeo, Kinoshita, Hiroo, Hamamoto, Kazuhiro, Hosoya, Morio, Shoki, Tsutomu, Hada, Hideo, Komano, Hiroshi, Okazaki, Shinji

Volltext

Development of Nanometer Resolution Focus Detector in Vacuum for Extreme Ultraviolet Microscope von Tanaka, Yuzuru, Watanabe, Takeo, Hamamoto, Kazuhiro, Kinoshita, Hiroo

Volltext

Resist Outgassing by EUV Irradiation von Watanabe, Takeo, Hamamoto, Kazuhiro, Kinoshita, Hiroo, Tsubakino, Harushige, Hada, Hideo, Komano, Hiroshi, Endo, Masayuki, Sasago, Masaru

Volltext

Mitigation of Low Outgassing and Small Line Edge Roughness for EUVL Resist von Watanabe, Takeo, Kinoshita, Hiroo, Hamamoto, Kazuhiro, Hada, Hideo, Komano, Hiroshi

Volltext

Investigation of Contamination Removal from Finished EUVL Mask von Hamamoto, Kazuhiro, Takada, Shintaro, Watanabe, Takeo, Sakaya, Noriyuki, Shoki, Tsutomu, Hosoya, Morio, Kinoshita, Hiroo

Volltext

Fine Pattern Replication by EUV Lithography von Hamamoto, Kazuhiro, Watanabe, Takeo, Tsubakino, Harushige, Kinoshita, Hiroo, Shoki, Tsutomu, Hosoya, Morio

Volltext

The Histological Detection of Ulcerative Colitis Using a No-Code Artificial Intelligence Model von Hamamoto, Yuichiro, Kawamura, Michihiro, Uchida, Hiroki, Hiramatsu, Kazuhiro, Katori, Chiaki, Asai, Hinako, Shimizu, Shigeki, Egawa, Satoshi, Yoshida, Kyotaro

Volltext

REFLECTIVE MASK BLANK, REFLECTIVE MASK, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE von HAMAMOTO, Kazuhiro

Volltext bestellen

Outgassing Characteristics of Structural Materials and the Removal of Contaminants from EUVL Masks using 172-nm Radiation von Hamamoto, Kazuhiro, Tanaka, Yuzuru, Watanabe, Takeo, Sakaya, Noriyuki, Hosoya, Morio, Shoki, Tsutomu, Sugahara, Hiroshi, Hishinuma, Nobuyuki, Hada, Hideo, Kinoshita, Hiroo

Volltext

Resolution Enhancement of Extreme Ultraviolet Microscope Using an Extreme Ultraviolet Beam Splitter von Osugi, Masafumi, Tanaka, Kazuumi, Sakaya, Noriyuki, Hamamoto, Kazuhiro, Watanabe, Takeo, Kinoshita, Hiroo

Volltext