Investigation of Evolution Processes of Wafer Profiles With Edge Over Erosion in Copper CMP von Wu, Lixiao, Hahn, Sookap, Yan, Changfeng

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Mechanism of internal gettering of interstitial impurities in Czochralski-grown silicon von GILLES, D, WEBER, E. R, SOOKAP HAHN

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Hydrogen introduction and hydrogen-enhanced thermal donor formation in silicon von Stein, H. J., Hahn, SooKap

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Effects of Laser Back‐Side Damage upon Mechanical Properties of Silicon von Elwell, Dennis, Hahn, Sookap

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Os papéis da ciência dos materiais e da engenharia para uma sociedade sustentável von Hahn, Sookap

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Depth profiles for hydrogen-enhanced thermal donor formation in silicon : spreading resistance probe measurements von STEIN, H. J, HAHN, S

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Os papéis da ciência dos materiais e da engenharia para uma sociedade sustentável von Sookap Hahn

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Effect of HCl on silicon point defect formation during thermal oxidation of (100) float zone silicon wafers von OH, S, TILLER, W. A, HAHN, S

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