Intermixing reduction in ultra-thin titanium nitride/hafnium oxide film stacks grown on oxygen-inserted silicon and associated reduction of the interface charge dipole von Smith, Jeffrey A., Ni, Kai, Takeuchi, Hideki, Stephenson, Robert J., Chen, Yi-Ann, Hytha, Marek, Li, Shuyi, Nicollian, Paul E., Mears, Robert J., Datta, Suman

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Tuning of Schottky barrier height using oxygen-inserted (OI) layers and fluorine implantation von Zhang, Xi, Takeuchi, Hideki, Connelly, Daniel, Hytha, Marek, Mears, Robert J., Rubin, Leonard M., King Liu, Tsu-Jae

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Electron mobility enhancement in (100) oxygen-inserted silicon channel von Xu, Nuo, Takeuchi, Hideki, Hytha, Marek, Cody, Nyles W., Stephenson, Robert J., Kwak, Byungil, Cha, Seon Yong, Mears, Robert J., King Liu, Tsu-Jae

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Punch-Through Stop Doping Profile Control via Interstitial Trapping by Oxygen-Insertion Silicon Channel von Takeuchi, Hideki, Choutov, Dmitri, Agrawal, Nidhi, Datta, Suman, Mears, Robert J., Stephenson, Robert J., Hytha, Marek, Connelly, Daniel, Fastenko, Pavel, Burton, Richard, Cody, Nyles W., Weeks, Doran

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Suppressing Oxidation-Enhanced Diffusion of Boron in Silicon With Oxygen-Inserted Layers von Connelly, Daniel, Burton, Richard, Cody, Nyles W., Fastenko, Pavel, Hytha, Marek, Stephenson, Robert, Takeuchi, Hideki, Weeks, Keith Doran, Mears, Robert

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Comparison of SOI Versus Bulk FinFET Technologies for 6T-SRAM Voltage Scaling at the 7-/8-nm Node von Xi Zhang, Connelly, Daniel, Takeuchi, Hideki, Hytha, Marek, Mears, Robert J., Liu, Tsu-Jae King

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Analysis of 7/8-nm Bulk-Si FinFET Technologies for 6T-SRAM Scaling von Xi Zhang, Connelly, Daniel, Peng Zheng, Takeuchi, Hideki, Hytha, Marek, Mears, Robert J., Tsu-Jae King Liu

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Effects of oxygen-inserted layers and oxide capping layer on dopant activation for the formation of ultrashallow p-n junctions in silicon von Zhang, Xi, Connelly, Daniel, Takeuchi, Hideki, Hytha, Marek, Mears, Robert J., Rubin, Leonard M., Liu, Tsu-Jae King

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Thermodynamics of Catalytic Formation of Dimethyl Ether from Methanol in Acidic Zeolites von Hytha, Marek, Štich, Ivan, Gale, Julian D., Terakura, Kiyoyuki, Payne, Michael C.

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(Invited) Applications of Oxygen Inserted Epitaxy von Mears, Robert J, Hytha, Marek, Takeuchi, Hideki

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Extension of Planar Bulk n-Channel MOSFET Scaling With Oxygen Insertion Technology von Nuo Xu, Takeuchi, Hideki, Damrongplasit, Nattapol, Stephenson, Robert J., Xiangyang Huang, Cody, Nyles W., Hytha, Marek, Mears, Robert J., Tsu-Jae King Liu

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Comparative Study of Uniform Versus Supersteep Retrograde MOSFET Channel Doping and Implications for 6-T SRAM Yield von Damrongplasit, Nattapol, Nuo Xu, Takeuchi, Hideki, Stephenson, Robert J., Cody, Nyles W., Yiptong, Augustin, Xiangyang Huang, Hytha, Marek, Mears, Robert J., Tsu-Jae King Liu

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Semiconductor device including superlattice with O18 enriched monolayers von Weeks, Keith Doran, Hytha, Marek, Cody, Nyles Wynn

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METHOD FOR MAKING SEMICONDUCTOR DEVICE INCLUDING A SUPERLATTICE AND ENRICHED SILICON 28 EPITAXIAL LAYER von HYTHA, MAREK, WEEKS, KEITH DORAN, TAKEUCHI, HIDEKI, CODY, NYLES WYNN

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METHOD FOR MAKING SEMICONDUCTOR DEVICE WITH SELECTIVE ETCHING OF SUPERLATTICE TO ACCUMULATE NON-SEMICONDUCTOR ATOMS von WEEKS, Keith Doran, CODY, Nyles Wynn, HYTHA, Marek

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METHOD FOR MAKING SEMICONDUCTOR DEVICE WITH SELECTIVE ETCHING OF SUPERLATTICE TO DEFINE ETCH STOP LAYER von WEEKS, Keith Doran, CODY, Nyles Wynn, HYTHA, Marek

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Method for making semiconductor device including a superlattice and enriched silicon 28 epitaxial layer von Weeks, Keith Doran, Hytha, Marek, Takeuchi, Hideki, Cody, Nyles Wynn

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SPIN-QUBIT SEMICONDUCTOR DEVICES WITH QUANTUM DOTS EMBEDDED IN A 28-SILICON ENRICHED DEVICE LAYER ON A NON-ENRICHED SUBSTRATE AND A BARRIER SUPERLATTICE AND RELATED METHODS von WEEKS, Keith, CODY, Nyles, TAKEUCHI, Hideki, MEARS, Robert, HYTHA, Marek

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METHOD FOR MAKING SEMICONDUCTOR DEVICE WITH SELECTIVE ETCHING OF SUPERLATTICE TO ACCUMULATE NON-SEMICONDUCTOR ATOMS von HYTHA, MAREK, WEEKS, KEITH DORAN, CODY, NYLES WYNN

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SEMICONDUCTOR DEVICE INCLUDING A SUPERLATTICE AND ENRICHED SILICON 28 EPITAXIAL LAYER von Weeks, Keith Doran, Hytha, Marek, Takeuchi, Hideki, Cody, Nyles Wynn

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