Short wavelength radiation source with multi-segment collector module von SIDELNIKOV YURIY VIKTOROVICH, ELVI SAMIR, LASH ALEXANDER ANDREEVICH, VINOKHODOV ALEKSANDR YURIEVICH, IVANOV VLADIMIR VITALIEVICH, KOSELEV KONSTANTIN NIKOLAEVICH, GRUSHKOV DENIS ALEKSANDROVICH, KRIVSSON VLADIMIR MIKHAILOVICH, MEDVEDEV VYACHESLAV VALERYEVICH, YAKUSHEV OLEG FELIKSOVICH, KLIVOKOLYTOV MIKHAIL SERGEEVICH, HRISTOFOROV OLEG BORISOVICH

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