Investigation on Pad Surface Conditioner to Control Dishing Amount in Cu Damascene Process von Kim, Jongwon, Kim, Hojoong, Hong, Seokji, Hwang, Hasub

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Double-sided adhesive tape for adhering polishing pad enabling easy discharge of air bubbles, and chemical mechanical polishing apparatus using same von KIM SEUNG-GEUN, HONG SEOKJI, MIN BYUNG-JU, JEONG JEONG-YEON, JO KANG-MOON

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A windowed polishing pad and method of manufacturing same von KANG HAK-SU, JANG HYUN-IL, HONG SEOKJI, MIN BYUNG-JU, JUNG DAE-HAN, PARK GI-YOUNG

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Method of manufacturing polishing pad window and polishing pad window manufactured thereby von KANG HAK-SU, JANG HYUN-IL, HONG SEOKJI, MIN BYUNG-JU, JUNG DAE-HAN, PARK GI-YOUNG

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COMPOSITE POLISHING PAD COMPRISING A HIGH WEAR RESISTANCE THIN FILM COATING COATED WITH CARBON NANOTUBES von KIM SEUNG-GEUN, KIM SAN-HA, KIM, SEONG-JAE, KANG MIN WOO, HONG SEOKJI, CHOI JUNG-HEE, MIN BYUNG-JU, OH NAM KYU, JUNG JI-HOON, YOO HYUN JUN, KANG SEOK-KYUNG

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Composite polishing pad comprising carbon nanotubes and method for producing same von KIM SEUNG-GEUN, KIM SAN-HA, KIM, SEONG-JAE, KANG MIN WOO, HONG SEOKJI, CHOI JUNG-HEE, MIN BYUNG-JU, OH NAM KYU, JUNG JI-HOON, YOO HYUN JUN, KANG SEOK-KYUNG

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Method for cleaning and tidying clothing von LIM MYUNGHOON, LEE TAEHEE, HONG SEOKJI

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