Treffer 1 - 4 von 4 für Suche 'HOLLAND JOHN,PANAGOPOULOS THEODOROS', Suchdauer: 0,23s Treffer weiter einschränken
  1. 1
    Apparatus for controlling temperature of a substrate

    Apparatus for controlling temperature of a substrate von HOLLAND JOHN,PANAGOPOULOS THEODOROS

    Volltext bestellen
    Patent

    Zu den Favoriten
    Gespeichert in:
  2. 2
    Method and apparatus for controlling temperature of a substrate

    Method and apparatus for controlling temperature of a substrate von HOLLAND JOHN,PANAGOPOULOS THEODOROS

    Volltext bestellen
    Patent

    Zu den Favoriten
    Gespeichert in:
  3. 3
    Plasma generation and control device and method

    Plasma generation and control device and method von SHANNON STEVEN C.,PATERSON ALEX,PANAGOPOULOS THEODOROS,HOLLAND JOHN P.,GRIMARD DENNIS,TAKAKURA YASHUSHI

    Volltext bestellen
    Patent

    Zu den Favoriten
    Gespeichert in:
  4. 4
    Plasma reactor apparatus with independent capacitive and toroidal plasma sources

    Plasma reactor apparatus with independent capacitive and toroidal plasma sources von PETERSON ALEXANDER M.,TODOROW VALENTIN N.,PANAGOPOULOS THEODOROS,HATCHER BRIAN K.,KATZ DAN,HAMMOND IV EDWARD P.,HOLLAND JOHN P.,MATYUSHKIN ALEXANDER

    Volltext bestellen
    Patent

    Zu den Favoriten
    Gespeichert in:

Suchwerkzeuge: