Diamond-like carbon for MEMS von Peiner, Erwin, Tibrewala, Arti, Bandorf, Ralf, Lüthje, Holger, Doering, Lutz, Limmer, Wolfgang

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Multifunctional thin film sensors based on amorphous diamond-like carbon for use in tribological applications von Biehl, Saskia, Lüthje, Holger, Bandorf, Ralf, Sick, Jan-Hinrich

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High Rate Deposition of Magnetic Material by Gas Flow Sputtering von Bandorf, Ralf, Bloche, Andre, Ortner, Kai, Lüthje, Holger, Jung, Thomas

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Different carbon based thin films and their microtribological behaviour in MEMS applications von Bandorf, Ralf, Lüthje, Holger, Henke, Cord, Wiebe, Jens, Sick, Jan-Hinrich, Küster, Rolf

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Coated high-performance structural elements or components and method of manufacturing such elements or components von LUETHJE, HOLGER

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Sensor zur Zustandsbestimmung von Kenngrößen an mechanischen Komponenten unter Verwendung von amorphen Kohlenstoffschichten mit piezoresistiven Eigenschaften von BRAND, JOCHEN, LUETHJE, HOLGER

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VERFAHREN UND VORRICHTUNG ZUR BESTIMMUNG DER VERSCHLEISSRESISTENZ EINER OBERFL CHE von WORTMANN, ANDREAS, LUETHJE, HOLGER

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METHOD AND DEVICE FOR DETERMINATION OF THE WEAR RESISTANCE OF A SURFACE von WORTMANN, ANDREAS, LUETHJE, HOLGER

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VORRICHTUNG UND VERFAHREN ZUR BESTIMMUNG DER BEANSPRUCHUNG EINES WERKZEUGS MIT DÜNNSCHICHTSENSOREN von LUETHJE, HOLGER, SCHNETTKER, THORSTEN

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DEVICE AND METHOD FOR DETERMINING THE STRESS PLACED UPON A TOOL WITH THIN-LAYER SENSORS von LUETHJE, HOLGER, SCHNETTKER, THORSTEN

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Method and device for determination of the wear resistance of a surface von WORTMANN ANDREAS, LUETHJE HOLGER

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Method for monitoring reduction of a surface especially a bearing surface has an array of embedded electric contacts at staggered depths von LUETHJE, HOLGER, GRUNDMANN, ANDREAS

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Measurement and adjustment of pressure applied by plastics granulator blades against perforated plate involves pressure measurement by sensors on blades and variation of blade pres... von LUETHJE, HOLGER, GRUNDMANN, ANDREAS

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DEVICE AND METHOD FOR DETERMINING THE STRESS PLACED UPON A TOOL WITH THIN-LAYER SENSORS von LUETHJE, HOLGER, SCHNETTKER, THORSTEN

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METHOD AND DEVICE FOR DETERMINATION OF THE WEAR RESISTANCE OF A SURFACE von WORTMANN, ANDREAS, LUETHJE, HOLGER

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Device for adjusting and verifying the tension force of screwed connections von Luethje, Holger, Sick, Jan-Hinrich

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Device for adjusting and verifying the tension force of screwed connections von LUETHJE HOLGER, SICK JAN-HINRICH

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Thin layer mask used for producing microstructures in microelectronics, nanotechnology and in microsystems technology is produced by selectively irradiating a layer applied on a su... von BIEHL, SASKIA, LUETHJE, HOLGER

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Roller bearing with integrated state measurement has bearing shell with mutually concentric inner and outer parts and integrated sensing arrangement between them as force-sensitive... von BIEHL, SASKIA, LUETHJE, HOLGER

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Use of a layer made from diamond-like carbon as temperature sensor in machine components and tools von BIEHL, SASKIA, LUETHJE, HOLGER

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