The push-pull principle: an electrostatic actuator concept for low distortion acoustic transducers von Kaiser, Bert, Schenk, Hermann A. G., Ehrig, Lutz, Wall, Franziska, Monsalve, Jorge M., Langa, Sergiu, Stolz, Michael, Melnikov, Anton, Conrad, Holger, Schuffenhauer, David, Schenk, Harald

Volltext

A small-gap electrostatic micro-actuator for large deflections von Conrad, Holger, Schenk, Harald, Kaiser, Bert, Langa, Sergiu, Gaudet, Matthieu, Schimmanz, Klaus, Stolz, Michael, Lenz, Miriam

Volltext

Large-Signal Equivalent-Circuit Model of Asymmetric Electrostatic Transducers von Monsalve, Jorge M., Melnikov, Anton, Kaiser, Bert, Schuffenhauer, David, Stolz, Michael, Ehrig, Lutz, Schenk, Hermann A. G., Conrad, Holger, Schenk, Harald

Volltext

Electrostatically Driven In-Plane Silicon Micropump for Modular Configuration von Uhlig, Sebastian, Gaudet, Matthieu, Langa, Sergiu, Schimmanz, Klaus, Conrad, Holger, Kaiser, Bert, Schenk, Harald

Volltext

From single-ended to push-pull electrostatic MEMS speakers for in-ear audio applications von Ehrig, Lutz, Schenk, Hermann A. G., Wall, Franziska, Melnikov, Anton, Kaiser, Bert, Langa, Sergiu, Stolz, Michael, Monsalve Guaracao, Jorge Mario, Mrosk, Andreas, Conrad, Holger

Volltext

Concept and proof for an all-silicon MEMS micro speaker utilizing air chambers von Kaiser, Bert, Langa, Sergiu, Ehrig, Lutz, Stolz, Michael, Schenk, Hermann, Conrad, Holger, Schenk, Harald, Schimmanz, Klaus, Schuffenhauer, David

Volltext

About stress in filled DRIE-trenches von Kaiser, Bert, Drabe, Christian, Graßhoff, Thomas, Conrad, Holger, Schenk, Harald

Volltext

Single crystal silicon micro mirrors von Schenk, Harald, Sandner, Thilo, Drabe, Christian, Klose, Thomas, Conrad, Holger

Volltext

MEMS CONVERTER FOR INTERACTION WITH A VOLUME FLOW RATE OF A FLUID, AND METHOD FOR PRODUCING SAME von CONRAD, Holger, SCHENK, Harald

Volltext bestellen

Gerotor and pump apparatus having a gerotor device von Conrad, Holger, Klein, Torsten

Volltext bestellen

Microelectromechanical Acoustic Pressure-Generating Device with Improved Drive von Conrad, Holger, Unamuno, Anartz

Volltext bestellen

MICROELECTROMECHANICAL ACOUSTIC PRESSURE-GENERATING DEVICE WITH IMPROVED DRIVE von Conrad, Holger, Unamuno, Anartz

Volltext bestellen

GEROTOR AND PUMP APPARATUS HAVING A GEROTOR DEVICE von Conrad, Holger, Klein, Torsten

Volltext bestellen

MEMS transducer for interacting with a volume flow of a fluid, and method of producing same von Conrad, Holger, Schenk, Harald

Volltext bestellen

MEMS Transducer for Interacting with a Volume Flow of a Fluid, and Method of Producing Same von CONRAD, Holger, SCHENK, Harald

Volltext bestellen

MEMS CONVERTER FOR INTERACTION WITH A VOLUME FLOW RATE OF A FLUID, AND METHOD FOR PRODUCING SAME von CONRAD, Holger, SCHENK, Harald

Volltext bestellen

Micro-electro-acoustic pressure generating device and micro-electro-mechanical loudspeaker system von UNAMUNO, ARNAZ, CONRAD HOLGER

Volltext bestellen

Gerotoreinrichtung und Pumpeneinrichtung mit Gerotoreinrichtung von Conrad, Holger, Klein, Torsten

Volltext bestellen

GEAR ROTOR AND PUMP DEVICE HAVING A GEAR ROTOR DEVICE von KLEIN TORSTEN, CONRAD HOLGER

Volltext bestellen

MEMS device, assembly comprising the MEMS device, and method of operating the MEMS device von Conrad, Holger, Monsalve Guaracao, Jorge Mario, Kaiser, Bert

Volltext bestellen