New Nb multi-layer fabrication process for large-scale SFQ circuits von Nagasawa, S., Satoh, T., Hinode, K., Kitagawa, Y., Hidaka, M., Akaike, H., Fujimaki, A., Takagi, K., Takagi, N., Yoshikawa, N.

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Device Yield in Nb-Nine-Layer Circuit Fabrication Process von Hidaka, M., Nagasawa, S., Hinode, K., Satoh, T.

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Current status and future prospect of the Nb-based fabrication process for single flux quantum circuits von Hidaka, M, Nagasawa, S, Satoh, T, Hinode, K, Kitagawa, Y

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Planarization Process for Fabricating Multi-Layer Nb Integrated Circuits Incorporating Top Active Layer von Satoh, T., Hinode, K., Nagasawa, S., Kitagawa, Y., Hidaka, M., Yoshikawa, N., Akaike, H., Fujimaki, A., Takagi, K., Takagi, N.

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Yield Evaluation of 10-kA/cm ^ Nb Multi-Layer Fabrication Process Using Conventional Superconducting RAMs von Nagasawa, S.., Satoh, T.., Hinode, K.., Kitagawa, Y.., Hidaka, M..

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Development of advanced Nb process for SFQ circuits von Nagasawa, S., Hinode, K., Satoh, T., Akaike, H., Kitagawa, Y., Hidaka, M.

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The Effects of a DC Power Layer in a 10-Nb-Layer Device for SFQ LSIs von Akaike, H., Shigehara, K., Fujimaki, A., Satoh, T., Hinode, K., Nagasawa, S., Hidaka, M.

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Fabrication process of planarized multi-layer Nb integrated circuits von Satoh, T., Hinode, K., Akaike, H., Nagasawa, S., Kitagawa, Y., Hidaka, M.

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Resistivity Increase in Ultrafine-Line Copper Conductor for ULSIs von Hinode, Kenji, Hanaoka, Yuko, Takeda, Ken-ichi, Kondo, Seiichi

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Hydrogen-Inclusion-Induced Critical Current Deviation of Nb/AlOx/Nb Josephson Junctions in Superconducting Integrated Circuits von Hinode, K., Satoh, T., Nagasawa, S., Hidaka, M.

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Effects of a DC-Power Layer Under a Ground Plane in SFQ Circuits von Akaike, H., Fujimaki, A., Satoh, T., Hinode, K., Nagasawa, S., Kitagawa, Y., Hidaka, M.

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Characteristics of Nb/AlOx/Nb junctions fabricated in planarized multi-layer Nb SFQ circuits von Satoh, T., Hinode, K., Akaike, H., Nagasawa, S., Kitagawa, Y., Hidaka, M.

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Inductances of striplines and stacked vias in planarized multi-layer Nb circuits von Akaike, H., Satoh, T., Hinode, K., Nagasawa, S., Kitagawa, Y., Hidaka, M.

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Effect of photomask pattern shape for a junction counter-electrode on critical current uniformity and controllability in Nb/AlOx/Nb junctions von AKAIKE, H, KITAGAWA, Y, SATOH, T, HINODE, K, NAGASAWA, S, HIDAKA, M

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Improvement of Fabrication Process for 10- ^ Multi-Layer Nb Integrated Circuits von Satoh, T.., Hinode, K.., Nagasawa, S.., Kitagawa, Y.., Hidaka, M..

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Reliability evaluation of Nb 10 kA/cm2 fabrication process for large-scale SFQ circuits von Nagasawa, S., Hinode, K., Satoh, T., Akaike, H., Kitagawa, Y., Hidaka, M.

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Fabrication of Superconducting Qubits With Al Trilayer Josephson Junctions von Satoh, T., Noguchi, Y., Yamagishi, M., Nagasawa, S., Hinode, K., Hidaka, M., Maezawa, M., Horikawa, T.

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Planarization of Josephson junctions for large-scale integrated Nb SFQ circuits by mechanical polishing von Satoh, Tetsuro, Hinode, K., Akaike, H., Kitagawa, Y., Nagasawa, S., Hidaka, M.

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Nb/AlOx/Nb junctions fabricated using ECR plasma etching von Akaike, H., Kitagawa, Y., Satoh, T., Hinode, K., Nagasawa, S., Hidaka, M.

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LPCVD titanium nitride for ULSIs von YOKOYAMA, N, HINODE, K, HOMMA, Y

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