Design Optimization of Synchrotron Radiation Lithography Beamline for a Compact Storage Ring von Shimano, Hiroki, Takashi Hifumi, Takashi Hifumi, Yoshihiko Ozaki, Yoshihiko Ozaki

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Critical dimension control in synchrotron radiation lithography using a negative-tone chemical amplification resist von SUMITANI, H, WATANABE, H, ITOGA, K, HIFUMI, T, SUITA, M, OGUSHI, N, MIZUSAWA, N, UDA, K

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Analysis of overlay accuracy in 0.14 μm device fabrication using synchrotron radiation lithography von HIFUMI, T, SUMITANI, H, ITOGA, K, WATANABE, H, INOUE, M, MARUMOTO, K, OHSAWA, H, SAITOH, K

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PERFORMANCE OF SR LITHOGRAPHY IN GIGA-BIT DRAM FABRICATION von WATANABE, HIROSHI, SUMITANI, HIROAKI, ITOGA, KENJI, HIFUMI, TAKASHI, INOUE, MASAMI, MARUMOTO, KENJI

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A Pilot Study of the Hair-Trapping Method in Asiatic Black Bears (Ursus thibetanus): Determination of Optimal Survey Period for Estimating Population Size von Kiyoshi Yamauchi, Shigekazu Kurakake, Takahiro Morosawa, Mami Kondo, Reina Uno, Takashi Yuasa, Hifumi Tsuruga, Hidetoshi B. Tamate, Masaaki Yoneda

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DEFLECTING ELECTROMAGNET AND CIRCULAR ACCELERATOR von HIFUMI TAKASHI, TANAKA HIROBUMI

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26pZL-5 Optimization of Bending Magnets using an Inverse Method von Tanaka, Hirofumi, Hifumi, Takashi, Yamamoto, Kazuo, Kuroda, Yoichi

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SR Lithography Beamline System von SHIMANO, Hiroki, HIFUMI, Takashi, ITOGA, Kenji, OZAKI, Yoshihiko

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Analysis of Overlay Accuracy in 0.14 µm Device Fabrication using Synchrotron Radiation Lithography von Hifumi, Takashi, Sumitani, Hiroaki, Itoga, Kenji, Watanabe, Hiroshi, Inoue, Masami, Marumoto, Kenji, Ohsawa, Hiroshi, Saitoh, Kenji

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Circular accelerator von TANAKA HIROFUMI, HIFUMI TAKASHI, YOSHIDA KATSUHISA, KURODA YOICHI, YAMAMOTO KAZUO

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Circular accelerator von Tanaka, Hirofumi, Hifumi, Takashi, Yoshida, Katsuhisa, Yamamoto, Kazuo, Kuroda, Yoichi

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26pZL-5 逆解法アルゴリズムを用いた偏向電磁石端部形状最適化(ビーム診断,ビーム制御,ビーム物理領域) von 田中, 博文, 一二三, 敬, 山本, 和男, 黒田, 洋一

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CIRCULAR ACCELERATOR von HIFUMI TAKASHI, YOSHIDA KATSUHISA, KURODA YOICHI, TANAKA HIROBUMI, YAMAMOTO KAZUO

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CIRCULAR ACCELERATOR von HIFUMI TAKASHI, YOSHIDA KATSUHISA, KURODA YOICHI, TANAKA HIROBUMI, YAMAMOTO KAZUO

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CIRCULAR ACCELERATOR von TANAKA HIROFUMI, HIFUMI TAKASHI, YOSHIDA KATSUHISA, KURODA YOICHI, YAMAMOTO KAZUO

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Kreisbeschleuniger von KURODA, YOICHI, YOSHIDA, KATSUHISA, YAMAMOTO, KAZUO, TANAKA, HIROFUMI, HIFUMI, TAKASHI

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X-RAY EXPOSURE APPARATUS von HIFUMI TAKASHI, KAMETANI HITOSHI

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SHOCK WAVE DELAY TUBE von HIFUMI TAKASHI, NAKADA SHUHEI

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METHOD AND DEVICE FOR EVALUATING ELECTRICAL CHARACTERISTIC OF SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE von NISHI KAZUHISA, HIFUMI TAKASHI, MARUNO SHIGEMITSU, ABE YUJI

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Circular accelerator von TANAKA HIROFUMI, HIFUMI TAKASHI, YOSHIDA KATSUHISA, KURODA YOICHI, YAMAMOTO KAZUO

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