Direct Al–Al contact using low temperature wafer bonding for integrating MEMS and CMOS devices von Lin, H., Stevenson, J.T.M., Gundlach, A.M., Dunare, C.C., Walton, A.J.

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Reactive ion etching of zinc oxide (ZnO) in SiCl4 based plasmas von MASTROPAOLO, E, GUNDLACH, A. M, FRAGKIADAKIS, C, KIRBY, P. B, CHEUNG, R

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Direct measurement of residual stress in sub-micron interconnects von Horsfall, A B, Santos, J M M dos, Soare, S M, Wright, N G, O'Neill, A G, Bull, S J, Walton, A J, Gundlach, A M, Stevenson, J T M

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The electrical characteristics of 4H-SiC Schottky diodes after inductively coupled plasma etching von PLANK, N. O. V, JIANG, Liudi, GUNDLACH, A. M, CHEUNG, R

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Effect of reactive ion etching on amorphous carbon nitride films von Jiang, Liudi, Fitzgerald, A. G., Rose, M. J., Gundlach, A. M., Cheung, R.

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Incorporation of helium-implant-induced cavities near the active regions of metal–oxide–semiconductor devices: Effects on dc electrical characteristics von Terry, J., Haworth, L. I., Gundlach, A. M., Stevenson, J. T. M., Vishnyakov, V. M., Donnelly, S. E.

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Null holographic test structures for the measurement of overlay and its statistical variation von AbuGhazaleh, S.A., Christie, P., Agrawal, V., Stevenson, J.T.M., Walton, A.J., Gundlach, A.M., Smith, S.

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Test chip for the development and evaluation of sensors for measuring stress in metal interconnects von Terry, J.G., Smith, S., Walton, A.J., Gundlach, A.M., Stevenson, J.T.M., Horsfall, A.B., Kai Wang, dos Santos, J.M.M., Soare, S.M., Wright, N.G., O'Neill, A.G., Bull, S.J.

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The Effect of Plasma Etching on the Electrical Characteristics of 4H-SiC Schottky Diodes von Gundlach, A.M., Cheung, Rebecca, Plank, N.O.V., Jiang, Liudi

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Fabrication of prototype imaging arrays for SCUBA-2 von Hilton, G.C., Beall, J.A., Doriese, W.B., Duncan, W.D., Ferreira, L.S., Irwin, K.D., Reintsema, C.D., Ullom, J.N., Vale, L.R., Xu, Y., Zink, B.L., Parkes, W., Bunting, A.S., Dunare, C.C., Gundlach, A.M., Stevenson, J.T.M., Walton, A.J., Schulte, E., Corrales, E., Sienicki, J.P., Bintley, Dan, Ade, P.A.R., Sudiwala, Rashmi V., Woodcraft, Adam L., Halpern, Mark, Holland, W., Audley, M.D., MacIntosh, M.

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Electrical characterization of platinum deposited by focused ion beam von Smith, S., Walton, A.J., Bond, S., Ross, A.W.S., Stevenson, J.T.M., Gundlach, A.M.

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An electrical test structure for the measurement of planarization von Elliott, J.P., Fallon, M., Walton, A.J., Stevenson, J.T.M., O'Hara, A., Gundlach, A.M.

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Role of topography sensing for infection-structure differentiation in cereal rust fungi von Read, N.D, Kellock, L.J, Collins, T.J, Gundlach, A.M. (Edinburgh Univ. (United Kingdom). Inst. of Cell and Molecular Biology)

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Fabrication of 200nm field effect transistors by X-ray lithography using a laser-plasma X-ray source von Reeves, C.M., Turcu, I.C.E., Stevenson, J.T.M., Ross, A.W.S., Gundlach, A.M., Prewett, P., Lawes, R.A., Anastasi, P., Burge, R., Michell, P.

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Direct measurement of residual stress in integrated circuit interconnect features von Horsfall, A.B., dos Santos, J.M.M., Soare, S.M., Wright, N.G., O’Neill, A.G., Bull, S.J., Walton, A.J., Gundlach, A.M., Stevenson, J.T.M.

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180nm X-ray lithography with a high repetition rate laser-plasma source von Turcu, ICE, Reeves, CM, Stevenson, JTM, Ross, AWS, Gundlach, AM, Prewett, P, Anastasi, P, Koek, B, Mitchell, P, Lake, P

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Coupling between localized states in resonant tunnelling von Stroh, R J, Pepper, M, Gundlach, A M, Stevenson, J T M

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Sensitivity of a Rotating Beam Sensor for Stress Evaluation in Aluminium Thin Films von Batista, António Castanhola, Wang, Kai, Wright, Nicolas G., Walton, Anthony J., Soare, S.M., Pina, J.C.P., O'Neill, Anthony G., Bull, S.J., dos Santos, J.M.M., Gundlach, A.M., Horsfall, Alton B., Stevenson, J.T.M., Terry, J.G.

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Techniques to improve the flatness of reflective micro-optical arrays von Seunarine, K, Calton, D.W, Underwood, I, Stevenson, J.T.M, Gundlach, A.M, Begbie, M

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Prototype detector technology for the SCUBA-2 submillimetre bolometer array von Walton, A. J., Parkes, W, Terry, J. G., Dunare, C, Stevenson, J. T. M., Gundlach, A. M., Bunting, A, Smith, S, Hilton, G. C., Irwin, K. D., Ullom, J. N., Duncan, W. D., Holland, W. S., Audley, M. D., McGregor, H, Ade, P. A. R., Sudiwala, R. V., Woodcraft, A. L., Schulte, E

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