Reflective electron beam lithography: A maskless ebeam direct write lithography approach using the reflective electron beam lithography concept von Petric, Paul, Bevis, Chris, McCord, Mark, Carroll, Allen, Brodie, Alan, Ummethala, Upendra, Grella, Luca, Cheung, Anthony, Freed, Regina

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Three-dimensional simulation of top down scanning electron microscopy images von Grella, Luca, Lorusso, Gian, Lee, Paul, Frank, Fan, Adler, David L.

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Simulations of scanning electron microscopy imaging and charging of insulating structures von Grella, Luca, Lorusso, Gian, Adler, David L.

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REBL: A novel approach to high speed maskless electron beam direct write lithography von Petric, Paul, Bevis, Chris, Carroll, Allen, Percy, Henry, Zywno, Marek, Standiford, Keith, Brodie, Alan, Bareket, Noah, Grella, Luca

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Space charge insensitive electron gun designs von Grella, Luca, Sears, Christopher

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Charge control device for a system with multiple electron beams von Grella, Luca, Sears, Christopher

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Fabrication of 5 nm resolution electrodes for molecular devices by means of electron beam lithography von DI FABRIZIO, E, GRELLA, L, GENTILI, M, BACIOCCHI, M, MASTROGIACOMO, L, MORALES, P

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COLD-FIELD-EMITTER ELECTRON GUN WITH SELF-CLEANING EXTRACTOR USING REVERSED E-BEAM CURRENT von CHUBUN, Nikolai, PITTS, Stephen, GRELLA, Luca

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Cold-field-emitter electron gun with self-cleaning extractor using reversed e-beam current von GRELLA Luca, CHUBUN Nikolai, PITTS Stephen

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Cold-field-emitter electron gun with self-cleaning extractor using reversed e-beam current von Pitts, Stephen, Chubun, Nikolai, Grella, Luca

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Fast proximity corrections for electron-beam-fabricated high resolution and high-aspect-ratio Fresnel zone plate von DI FABRIZIO, E, GRELLA, L, BACIOCCHI, M, GENTILI, M, PESCHIAROLI, D, MASTROGIACOMO, L, MAGGIORA, R

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Microphotonic devices fabricated by Silicon micromachining techniques von DI FABRIZIO, E, BACIOCCHI, M, GENTILI, M, GRELLA, L, MASTROGIACOMO, L

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SPACE CHARGE INSENSITIVE ELECTRON GUN DESIGNS von SEARS, Christopher, GRELLA, Luca

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Space Charge Insensitive Electron Gun Designs von Grella, Luca, Sears, Christopher

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CHARGE CONTROL DEVICE FOR A SYSTEM WITH MULTIPLE ELECTRON BEAMS von Grella, Luca, Sears, Christopher

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CHARGE CONTROL DEVICE FOR A SYSTEM WITH MULTIPLE ELECTRON BEAMS von SEARS, Christopher, GRELLA, Luca

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Cold-Field-Emitter Electron Gun with Self-Cleaning Extractor Using Reversed E-Beam Current von Pitts, Stephen, Chubun, Nikolai, Grella, Luca

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COLD-FIELD-EMITTER ELECTRON GUN WITH SELF-CLEANING EXTRACTOR USING REVERSED E-BEAM CURRENT von CHUBUN, Nikolai, PITTS, Stephen, GRELLA, Luca

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HIGH RESOLUTION ELECTRON BEAM APPARATUS WITH DUAL-APERTURE SCHEMES von JIANG, Xinrong, CHUBUN, Nikolai, SEARS, Christopher, GRELLA, Luca

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System and method for controlling electron beams, and non-transitory computer-readable storage medium von GRELLA, LUCA, SEARS, CHRISTOPHER

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