Influence of the annealing schemes on the formation and stability of Ni(Pt)Si thin films: Partial, laser, total, and one-step annealings von Morris Anak, Fabriziofranco, Campos, Andréa, Grégoire, Magali, Estellon, Adrien, Lombard, Marc, Guyot, Thomas, Guillemin, Sophie, Mangelinck, Dominique

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Ni(Pt)-based CMOS-compatible contacts on p-InGaAs for III–V photonic devices von Boyer, Flore, Dabertrand, Karen, Bernier, Nicolas, Jany, Christophe, Gergaud, Patrice, Grégoire, Magali, Rafhay, Quentin, Rodriguez, Philippe

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Boron atomic-scale mapping in advanced microelectronics by atom probe tomography von Estivill, Robert, Juhel, Marc, Servanton, Germain, Gregoire, Magali, Lorut, Fréderic, Clement, Laurent, Chevalier, Pascal, Grenier, Adeline, Blavette, Didier

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Atomic scale investigation of arsenic segregation in high-k metal gate stacks von Estivill, Robert, Juhel, Marc, Gregoire, Magali, Grenier, Adeline, Delaye, Vincent, Blavette, Didier

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3D Atomic Scale Analysis of CMOS type structures for 14 nm UTBB-SOI technology von Estivill, Robert, Grenier, Adeline, Printemps, Tony, Juhel, Marc, Gregoire, Magali, Caubet, Pierre, Blavette, Didier

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C54-TiSi2 formation using nanosecond laser annealing of A-Si/Ti/A-Si stacks von Guelladress, Réda, Kerdilès, Sébastien, Dartois, Mélanie, Sabbione, Chiara, Gregoire, Magali, Mangelinck, Dominique

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C54-TiSi$_2$ formation using nanosecond laser annealing of A-Si/Ti/A-Si stacks von Guelladress, Réda, Kerdilès, Sébastien, Dartois, Mélanie, Sabbione, Chiara, Gregoire, Magali, Mangelinck, Dominique

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Influence of the annealing schemes on the formation and stability of Ni(Pt)Si thin films: partial, laser, total, and unique anneal von Morris Anak, Fabriziofranco, Campos, Andrea, Gregoire, Magali, Estellon, Adrien, Lombard, Marc, Guyot, Thomas, Guillemin, Sophie, Mangelinck, Dominique

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Influence of Si surface preparation on CoSi2 formation and agglomeration von Newman, Andréa, Campos, Andrea, Pujol, David, Fornara, Pascal, Gregoire, Magali, Mangelinck, Dominique

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Integration of the Ni/InP system on a 300mm platform for III-V/Si hybrid lasers von Boyer, Flore, Gergaud, Patrice, Dabertrand, Karen, Mariolle, Denis, Jany, Christophe, Nemouchi, Fabrice, Gregoire, Magali, Rafhay, Quentin, Rodriguez, Philippe

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Modeling of Fermi-Level Pinning Alleviation With MIS Contacts: n and pMOSFETs Cointegration Considerations-Part I von Borrel, Julien, Hutin, Louis, Rozeau, Olivier, Jaud, Marie-Anne, Martinie, Sébastien, Gregoire, Magali, Dubois, Emmanuel, Vinet, Maud

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Direct epitaxial growth of θ-Ni2Si by reaction of a thin Ni(10at.% Pt) film with Si(100) substrate von Panciera, Federico, Mangelinck, Dominique, Hoummada, Khalid, Texier, Michaël, Bertoglio, Maxime, De Luca, Anthony, Gregoire, Magali, Juhel, Marc

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Modeling of Fermi-Level Pinning Alleviation With MIS Contacts: n and pMOSFETs Cointegration Considerations-Part II von Borrel, Julien, Hutin, Louis, Rozeau, Olivier, Jaud, Marie-Anne, Martinie, Sebastien, Gregoire, Magali, Dubois, Emmanuel, Vinet, Maud

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Kinetics study of NiPt(10 at.%)/Si0.7Ge0.3 solid state reactions von Bourjot, E., Putero, M., Perrin-Pellegrino, C., Gergaud, P., Gregoire, M., Nemouchi, F., Mangelinck, D.

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Mise en oeuvre de procédés innovants pour l'optimisation de contacts TiSi pour les technologies imageurs avancées von Esposito, Laura

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Interconnection element and method of manufacturing the same von Gregoire, Magali

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Technological enhancers effect on Ni0.9Co0.1 silicide stability for 3D sequential integration von Deprat, Fabien, Nemouchi, Fabrice, Fenouillet-Beranger, Claire, Rodriguez, Philippe, Joblot, Sylvain, Gregoire, Magali, Barge, David, Gergaud, Patrice, Rambal, Nils, Batude, Perrine, Vinet, Maud

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INTERCONNECTION ELEMENT AND METHOD OF MANUFACTURING THE SAME von GREGOIRE, Magali

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Technological enhancers effect on Ni 0.9 Co 0.1 silicide stability for 3D sequential integration von Deprat, Fabien, Nemouchi, Fabrice, Fenouillet‐Beranger, Claire, Rodriguez, Philippe, Joblot, Sylvain, Gregoire, Magali, Barge, David, Gergaud, Patrice, Rambal, Nils, Batude, Perrine, Vinet, Maud

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INTERCONNECTION ELEMENT AND METHOD OF MANUFACTURING THE SAME von GREGOIRE, Magali

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